Analysis and Design Principles of MEMS Devices

Erscheinungsjahr 2005
ISBN: 978-0-444-51616-9
Verlag: Elsevier Science & Technology

Buch, Englisch, 328 Seiten, Format (B × H): 165 mm x 240 mm, Gewicht: 760 g

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.

Zielgruppe

Graduate students, researchers and engineers developing new MEMS devices

Autoren/Hrsg.

Bao, Minhang

Fachgebiete

• Naturwissenschaften Chemie Chemie Allgemein Pharmazeutische Chemie, Medizinische Chemie
• Naturwissenschaften Chemie Chemie Allgemein Toxikologie, Gefahrstoffe, Sicherheit in der Chemie
• Naturwissenschaften Chemie Chemie Allgemein Chemometrik, Chemoinformatik
• Naturwissenschaften Chemie Chemie Allgemein Chemische Labormethoden, Stöchiometrie

Inhaltsverzeichnis

Chapter 1. Introduction to MEMS devices
Chapter 2. Basic mechanics of beam and diaphragm structures
Chapter 3. Air Damping
Chapter 4. Electrostatic Actuation
Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
Chapter 6. Piezoresistive Sensing