Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2

Creating and Measuring Vacuum
Erscheinungsjahr 2025
ISBN: 978-0-443-33604-1
Verlag: Elsevier Science

Buch, Englisch, 400 Seiten, Format (B × H): 152 mm x 229 mm

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2: Creating and Measuring Vacuum reviews the many specialized components that must be effectively integrated to create, support, and measure vacuum. This includes pipes, valves, flexible bellows, and several types of vacuum pumps, including rotary vane, dry scroll, turbomolecular, and cryogenic varieties. Pressure sensors are also reviewed with specific attention to their operating principles, pressure range, accuracy, reproducibility, and calibration. The unique features of various vacuum components are highlighted to aid in the selection of devices appropriate for specific pressure ranges and operating conditions. This volume informs the reader about critical vacuum components and how they can be integrated in a complete, dynamically pumped, vacuum system. The specific nuances related to pressure ranges and vacuum component characteristics are featured. Design considerations, such as vacuum gauge placement relative to active gas flows, pressure differentials, and pressure control approaches are also discussed.

Autoren/Hrsg.

Gaines, J R

Healy, Matthew

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Verfahrenstechnik, Chemieingenieurwesen
• Geisteswissenschaften Design Produktdesign, Industriedesign
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Strömungslehre
• Naturwissenschaften Physik Physik Allgemein
• Naturwissenschaften Physik Mechanik Kontinuumsmechanik, Strömungslehre

Inhaltsverzeichnis

1. Pipes, Flanges and Fittings for Vacuum Systems
2. Bellows, Feedthroughs, Viewports and Adapters
3. Valves, Manipulation and Motion in Vacuum
4. Vacuum Pumps, Terms, Types, History, and Cost of Ownership
5. Vacuum Pumps for Rough Vacuum
6. Gas Transfer Pumps for High and Ultrahigh Vacuum
7. Gas Capture Pumps for High and Ultrahigh Vacuum and the Future of Pumps
8. Measuring Pressure in Vacuum
9. Common Vacuum Gauges
10. Sensor Location, Pressure Control, and Sensors for Extreme Conditions in Vacuum Systems

Über Autor(innen)

Gaines, J R
J.R. Gaines is the Technical Director of Education for the Kurt J. Lesker Company, Jefferson Hills PA, United States. He has more than 40 years of experience in the research, development, and commercialization of advanced materials technologies including superconductivity, semiconductors, cryogenics, space simulation, energy generation, and energy conversion and storage. His experience includes vacuum systems, thin-film deposition, inorganic chemistry, nanotechnology, and advanced ceramic processing. He currently develops and delivers Lesker's many educational programs through Lesker University teaching events.

Healy, Matthew
Matt Healy is Business Segment Manager at Kurt J. Lesker Company, Jefferson Hills PA, United States, specializing in materials processing and applications. He has a PhD in Chemistry from Harvard University, a BS in Chemistry from the Massachusetts Institute of Technology, and an MBA from University of Chicago Graduate School of Business. He began his research career as a post-doctoral scientist at the Department of Energy's Los Alamos National Laboratory. He was formerly Vice President of Product Management at Pixelligent Technologies, LLC and previously Director of Business Development of Digital Lumens and GE Lighting Division, and Product Line Director at ATMI.