MEMS Reliability

1. Auflage 2010
ISBN: 978-1-4419-6017-7
Verlag: Springer Us

Buch, Englisch, 291 Seiten, Format (B × H): 166 mm x 243 mm, Gewicht: 1340 g

Reihe: MEMS Reference Shelf

The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.

MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

Zielgruppe

Research

Autoren/Hrsg.

Hartzell, Allyson L

Da Silva, Mark G

Shea, Herbert R

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Produktionstechnik Zuverlässigkeitstechnik

Inhaltsverzeichnis

Introduction.- Reliability /Weibull, bathtub curve, basics (What is reliability?).- Failure Modes and Physics of Failure (POF).- Strategies for identifying root cause (FMEA).- Manufacturing Processes & Procedures.- Testing & Qualification Processes & Procedures.- Improving Reliability: Techniques and Tools.- Design for Reliability (DFR).