Hawkeye / Taschuk / Brett Glancing Angle Deposition of Thin Films

Engineering the Nanoscale
1. Auflage 2014
ISBN: 978-1-118-84733-6
Verlag: John Wiley & Sons
Format: EPUB
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 320 Seiten, E-Book

Reihe: Wiley Series in Materials for Electronic & Optoelectronic Applications

This book provides a highlypractical treatment of Glancing Angle Deposition (GLAD), a thinfilm fabrication technology optimized to produce precisenanostructures from a wide range of materials. GLAD providesan elegant method for fabricating arrays of nanoscale helices,chevrons, columns, and other porous thin film architectures usingphysical vapour deposition processes such as sputtering orevaporation. The book gathers existing procedures,methodologies, and experimental designs into a single, cohesivevolume which will be useful both as a ready reference for those inthe field and as a definitive guide for those entering it. Itcovers:
* Development and description of GLAD techniques fornanostructuring thin films
* Properties and characterization of nanohelices, nanoposts, andother porous films
* Design and engineering of optical GLAD films includingfabrication and testing, and chiral films
* Post-deposition processing and integration to optimize filmbehaviour and structure
* Deposition systems and requirements for GLAD fabrication
* A patent survey, extensiverelevant literature, and a survey of GLAD's wide range ofmaterial properties and diverse applications.

Autoren/Hrsg.

Hawkeye, Matthew M.

Taschuk, Michael T.

Brett, Michael J.