Holt / Joy SEM Microcharacterization of Semiconductors

1. Auflage 2013
ISBN: 978-1-4832-8867-3
Verlag: Elsevier Science & Techn.
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, Band Volume 12, 452 Seiten, Web PDF

Reihe: Techniques of Physics

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

Autoren/Hrsg.

Holt, D. B.

Joy, D. C.

Inhaltsverzeichnis

1;Front Cover;1
2;SEM Microcharacterization of Semiconductors;4
3;Copyright Page;5
4;Table of Contents;6
5;Contributors;8
6;Preface;10
7;Foreword;12
8;Part A: Foundations of Microcharacterization in Electron Beam Instruments;16
8.1;Chapter 1. An Introduction to Multimode Scanning Electron Microscopy;18
8.1.1;List of symbols;18
8.1.2;1.1 The SEM as a two-component system: signals, modes and contrast;20
8.1.3;1.2 Resolution: the specification of instrumental capabilities;23
8.1.4;1.3 Instrumentation;31
8.1.5;1.4 Types of electron beam instruments;40
8.1.6;References;42
8.2;Chapter 2. Modeling Electron Beam Interactions in Semiconductors;44
8.2.1;List of symbols;44
8.2.2;2.1 Introduction;46
8.2.3;2.2 Electron scattering;46
8.2.4;2.3 Monte Carlo electron trajectory simulation;60
8.2.5;2.4 Summary;76
8.2.6;References;77
8.2.7;Appendix;78
8.3;Chapter 3. Electron Channeling Patterns;84
8.3.1;List of symbols;84
8.3.2;3.1 Introduction;85
8.3.3;3.2 ECP contrast;86
8.3.4;3.3 Information in channeling patterns;98
8.3.5;3.4 Channeling micrographs;113
8.3.6;3.5 Selected area channeling patterns (SACP);115
8.3.7;3.6 Using selected area channeling pattern;120
8.3.8;3.7 Other techniques for SEM crystallography;128
8.3.9;References;131
8.3.10;Appendix;133
8.4;Chapter 4. The Emissive Mode and X-ray Microanalysis;134
8.4.1;List of symbols;134
8.4.2;4.1 Signals in the emissive mode;135
8.4.3;4.2 Detectors for imaging;138
8.4.4;4.3 Secondary electron imaging modes;143
8.4.5;4.4 Backscattered imaging modes;149
8.4.6;4.5 X-ray microanalysis;153
8.4.7;4.6 Quantitative microanalysis;155
8.4.8;4.7 Qualitative X-ray analysis of an unknown;159
8.4.9;4.8 Quantitative X-ray analysis;161
8.4.10;References;164
9;Part B: Quantitation and the Interpretation of Signals in the Individual Modes;166
9.1;Chapter 5. Voltage Contrast and Stroboscopy;168
9.1.1;List of symbols;168
9.1.2;5.1 Introduction;169
9.1.3;5.2 Principles;171
9.1.4;5.3 Instrumentation;192
9.1.5;5.4 Applications;221
9.1.6;5.5 Recent developments;250
9.1.7;References;253
9.2;Chapter 6. The Conductive Mode;256
9.2.1;List of symbols;257
9.2.2;6.1 Basic physical principles;260
9.2.3;6.2 Detection systems and contacts;275
9.2.4;6.3 EBIC and EBIV measurements;277
9.2.5;6.4 Theory of EBIC and CL defect contrast;311
9.2.6;6.5 ß-Conductivity;342
9.2.7;References;348
9.3;Chapter 7. Scanning Deep Level Transient Spectroscopy;354
9.3.1;List of symbols;354
9.3.2;7.1 Introduction;355
9.3.3;7.2 Fundamentals;360
9.3.4;7.3 Special techniques;370
9.3.5;7.4 Applications;380
9.3.6;7.5 Conclusions;384
9.3.7;Acknowledgements;385
9.3.8;References;385
9.4;Chapter 8. Cathodoluminescence Characterization of Semiconductors;388
9.4.1;List of symbols;389
9.4.2;8.1 Introduction;389
9.4.3;8.2 Luminescence phenomena;391
9.4.4;8.3 Cathodoluminescence;402
9.4.5;8.4 Cathodoluminescence analysis techniques;412
9.4.6;8.5 Applications;418
9.4.7;Bibliography;433
9.4.8;References;434
9.5;Chapter 9. The Electron Acoustic Mode;440
9.5.1;List of symbols;440
9.5.2;9.1 Introduction;441
9.5.3;9.2 Origin of SEAM signals and contrasts;442
9.5.4;9.3 Experimental conditions for SEAM;446
9.5.5;9.4 Application of SEAM to semiconductor characterization;451
9.5.6;9.5 Conclusions;459
9.5.7;Acknowledgements;459
9.5.8;References;459
10;Index;462