Micro and Nanomanufacturing

Softcover Nachdruck of hardcover 1. Auflage 2007
ISBN: 978-1-4419-3845-9
Verlag: Springer US

Buch, Englisch, 702 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 1060 g

Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining.

Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

Zielgruppe

Research

Autoren/Hrsg.

Jackson, Mark J.

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Produktionstechnik Fertigungstechnik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Produktionstechnik Werkzeugbau
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Technik Allgemein Nanotechnologie

Inhaltsverzeichnis

Principles of Micro- and Nanofabrication.- Microfabrication Using X- ray Lithography.- Manufacturing High Aspect Ratio Microstructures.- Meso-Micromachining.- Mechanical Micromachining.- Microgrinding.- Diamond Microcutting Tools.- Laser Micro- and Nanofabrication.- Micromachining Using Pulsed Water Droplets.- Diamond Nanogrinding.- Nanomachining.- Micro-and Nanomanufacturing.

Über Autor(innen)

Doctor Mark James Jackson is an Associate Professor of Mechanical Engineering Technology at Purdue University and was a Visiting Fellow at the University of Liverpool, U.K.

Doctor Jackson is active in research work concerned with understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Doctor Jackson has directed, co-directed, and managed research grants funded by the Engineering and Physical Sciences Research Council, The Royal Society of London, The Royal Academy of Engineering, European Union, Ministry of Defence, Atomic Weapons Establishment, National Science Foundation, N.A.S.A. and U. S. Department of Energy.

Doctor Jackson is Vice President and Chief Technology Officer of Vitrified Technologies, Inc., which is established to develop next generation nano and micro machine tools and cutting tools for nanotechnology applications. Dr. Jackson is strongly committed to working closely with manufacturing industry and has served on political committees to ensure that manufacturing counts.