NEMS/MEMS Technology and Devices, ICMAT2011

Erscheinungsjahr 2011
ISBN: 978-3-03785-146-3
Verlag: Trans Tech Publications

Sonstiges, Englisch, 236 Seiten, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g

The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic.

Autoren/Hrsg.

Khine, Lynn

Tsai, Julius M.

Fachgebiete

• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme

Inhaltsverzeichnis

Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio SensorsThick-Film Deposition of High-Viscous Liquid PhotopolymerDesign and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test ApplicationOptimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-CantileverMicrofabrication of a Planar Helix with Straight-Edge Connections Slow-Wave StructureSeparation Gap Estimation in Dynamic Systems Actuated by Casimir ForceA Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS CapacitorGEMS: A MEMS-Based Way for the Innervation of MaterialsOn the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory SystemsDesign Consideration of Membrane Structure for Thermal Actuated MicropumpDeveloping High Sensitivity Biomass Sensor Using Lam? Mode Square ResonatorFabrication of a Peltier Device Based on InSb and SbTe Thin FilmsGapfill Study of Polyimides for MEMS ApplicationsA Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic ApplicationsLow Cost and High Resolution X-Ray Lithography for Fabrication of MicroactuatorFBAR Resonators with Sufficient High Q for RF Filter ImplementationEvaluation of Piezoelectric Properties of AlN Using MEMS ResonatorsDiscrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-OsmosisSilicon Probes for Cochlear Auditory Nerve Stimulation and MeasurementFocused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer ApplicationsDesign, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical ImplantsTagging for Capsule Endoscopy LocalizationThe Negative p/2 Phase Shift of Total Reflect LightHigh Topography Polyimide CMP ProcessHydridosilane Modification of Metals: An Exploratory StudyMulti Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical RotorArea-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial ThermocoupleA Portable Thermal Cycler Using a PN Sandwich-Structure Peltier DeviceDirect Writing of Channels for Microfluidics in Silica by MeV Ion Beam LithographyStudies on Quasi-Static Au-to-Au Ohmic Contact for MEMS SwitchesDouble-Step Plasma Etching for SiO2 Microcantilever ReleaseDesign, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic ResonatorsDevelopment of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried OxideStudy of Dry and Wet Oxide Etching for MOSFET-Based MEMS DevicesOscillating Micromixers on a Compact DiscRobust Sequential Flow Controls on the Centrifugal PlatformFabrication of Micro-Cantilevers Using RF Magnetron Sputtered Silicon Carbide FilmsEffect of Temperature on the Electrical and Gas Sensing Properties of Polyaniline and Multiwall Carbon Nanotube Doped Polyaniline Composite Thin FilmsFabrication of MEMS Based Microspeaker Using Bulk Micromachining TechniqueSimulation Study of Side-by-Side Spiral Coil Design for MicromagnetometerFabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-DiscProposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier DeviceEffect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron SputteringOn-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO-PDMS Bonded ChipsA Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal SlabA New Robust Four Degree-of-Freedom Gyroscope DesignThree-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb ElectrodesInvestigation of Rhabdomyosarcoma Cell ElectrofusionInvestigation of Simple Process Technology for the Fabrication of Valveless MicropumpsMicro-Bubble Generation Using Continuous-Wave LaserPhotocatalytic Microreactor Using Monochromatic Visible Light