Developments in Surface Contamination and Cleaning, Volume 7

Cleanliness Validation and Verification
Erscheinungsjahr 2014
ISBN: 978-0-323-31303-2
Verlag: Elsevier Science

Buch, Englisch, 206 Seiten, Format (B × H): 159 mm x 240 mm, Gewicht: 488 g

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales.The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area.The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series.Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography.

Zielgruppe

Researchers and Engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography;  Researchers in an academic

Autoren/Hrsg.

Kohli, Rajiv

Mittal, Kashmiri L.

Fachgebiete

• Naturwissenschaften Physik Thermodynamik Oberflächen- und Grenzflächenphysik, Dünne Schichten
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Technologie der Oberflächenbeschichtung
• Naturwissenschaften Chemie Physikalische Chemie Kolloidchemie

Inhaltsverzeichnis

1 Sources and Generation of Surface Contaminants (Rajiv Kohli)
2 Particle Counting (John Mitchell)
3 Optically Stimulated Electron Emission (Mantosh Chawla)
4 Grazing Angle FTIR for Cleanliness Validation (Mary Thomson)
5 Test Verification of Medical Device Cleanliness (David Albert)
6 Cleaning Validation and its Regulatory Aspects in the Pharmaceutical Industry (S. Lakshmana Prabu)
7 Environmental and Regulatory Aspects of Green Cleaning (Jason Marshall)

Über Autor(innen)

Mittal, Kashmiri L.
Dr. Kashmiri (Kash) Mittal was associated with IBM from 1972 to 1994. Currently, he is teaching and consulting in the areas of adhesion science and technology and in surface contamination and cleaning. He is the founding editor of the Journal of Adhesion Science and Technology and is editor of more than 130 published books, many of them dealing with surface contamination and cleaning. In 2002, the Kash Mittal Award was inaugurated for his extensive efforts and significant contributions to the field of colloid and interface chemistry. Among his numerous awards, Dr. Mittal was awarded the title honoris causa by the Maria Curie-Sklodowska University in Lubin, Poland in 2003. Currently, he is teaching and consulting in the areas of surface contamination and cleaning and in adhesion science and technology.