Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals

1. Auflage 2021
ISBN: 978-3-030-63825-2
Verlag: Springer International Publishing

Buch, Englisch, 230 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 571 g

Reihe: Springer Theses

This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.

Zielgruppe

Research

Autoren/Hrsg.

Montero Álvarez, Daniel

Fachgebiete

• Naturwissenschaften Chemie Analytische Chemie
• Naturwissenschaften Chemie Chemie Allgemein
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik

Inhaltsverzeichnis

Introduction.- Experimental techniques.- Results: NLA using a short pulse duration KrF laser.- Results: NLA using a long pulse duration XeCl laser.- Results: Integrating the supersaturated material in a CMOS pixel matrix.

Über Autor(innen)

Daniel Montero was born in Guadalajara (Spain) in 1990. His passion for nature and technology, inherited from his mother and father respectively, led him to pursue a Physics degree at Complutense University of Madrid. He later got at the same university a Masters Degree in Renewable energies, and finally the PhD in Physics with European and Cum Laude special mentions. Recently, he joined IMEC in Belgium to continue his professional career as R&D Engineer in Plasma Etch.