Sarangan Nanofabrication

Principles to Laboratory Practice
1. Auflage 2016
ISBN: 978-1-4987-2559-0
Verlag: CRC Press
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 315 Seiten

Reihe: Optical Sciences and Applications of Light

This book is designed to introduce typical cleanroom processes, techniques, and their fundamental principles. It is written for the practicing scientist or engineer, with a focus on being able to transition the information from the book to the laboratory. Basic theory such as electromagnetics and electrochemistry is described in as much depth as necessary to understand and explain the current practice and their limitations. Examples from various areas of interest will be covered, such as the fabrication of photonic devices including photo detectors, waveguides, and optical coatings, which are not commonly found in other fabrication texts.

Autoren/Hrsg.

Sarangan, Andrew

Fachgebiete

• Technische Wissenschaften Technik Allgemein Technische Optik, Lasertechnologie
• Technische Wissenschaften Sonstige Technologien | Angewandte Technik Lasertechnologie, Holographie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde
• Technische Wissenschaften Technik Allgemein Nanotechnologie

Inhaltsverzeichnis

Introduction to Micro and Nano-Fabrication. Vacuum and Plasma technology. Physical vapor deposition. Chemical vapor deposition. Optical thin film coatings. Substrate materials. Photoresists and photolithography. Wet chemical etching. Plasma etching. Semiconductor Doping & annealing. Semiconductor metrology. Packaging. MEMS and microfluidic device fabrication. Fabrication examples.