Infrared Ellipsometry on Semiconductor Layer Structures

Phonons, Plasmons, and Polaritons
2004
ISBN: 978-3-540-23249-0
Verlag: Springer-Verlag GmbH

Buch, Englisch, Band 209, 196 Seiten, Book, Format (B × H): 162 mm x 242 mm, Gewicht: 1060 g

Reihe: Springer Tracts in Modern Physics

The study of semiconductor-layer structures using infrared ellipsometry is a rapidly growing field within optical spectroscopy. This book offers basic insights into the concepts of phonons, plasmons and polaritons, and the infrared dielectric function of semiconductors in layered structures. It describes how strain, composition, and the state of the atomic order within complex layer structures of multinary alloys can be determined from an infrared ellipsometry examination. Special emphasis is given to free-charge-carrier properties, and magneto-optical effects.

A broad range of experimental examples are described, including multinary alloys of zincblende and wurtzite structure semiconductor materials, and future applications such as organic layer structures and highly correlated electron systems are proposed.

Zielgruppe

Research

Autoren/Hrsg.

Schubert, Mathias

Fachgebiete

• Technische Wissenschaften Technik Allgemein Physik, Chemie für Ingenieure
• Naturwissenschaften Physik Elektromagnetismus Optik
• Naturwissenschaften Physik Elektromagnetismus Halbleiter- und Supraleiterphysik
• Technische Wissenschaften Sonstige Technologien | Angewandte Technik Angewandte Optik

Inhaltsverzeichnis

Introduction.- Ellipsometry.- Infrared Model Dielectric Functions.- Polaritons in Semiconductor Layer Structures.- Anisotropic Substrates.- Zinsblende-Structure Materials (III-V).- Wurtzite-Structure Materials (Group-III Nitrides, ZnO).- Magneto-optic Ellipsometry.