MEMS Vibratory Gyroscopes

Structural Approaches to Improve Robustness
2009
ISBN: 978-0-387-09535-6
Verlag: Springer US

Buch, Englisch, 260 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 576 g

Reihe: MEMS Reference Shelf

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Zielgruppe

Professional/practitioner

Autoren/Hrsg.

Shkel, Andrei

Acar, Cenk

Fachgebiete

• Wirtschaftswissenschaften Wirtschaftssektoren & Branchen Fertigungsindustrie Luftfahrtindustrie
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
• Technische Wissenschaften Verkehrstechnik | Transportgewerbe Fahrzeugtechnik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren
• Technische Wissenschaften Verkehrstechnik | Transportgewerbe Luft- und Raumfahrttechnik, Luftverkehr

Inhaltsverzeichnis

Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.