Micro-Nano Technology XIV

Selected, peer reviewed papers from the 14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2012), November 4-7, 2012, Hangzhou, China
Erscheinungsjahr 2013
ISBN: 978-3-03785-739-7
Verlag: Trans Tech Publications

Buch, Englisch, 1730 Seiten, Format (B × H): 170 mm x 240 mm, Gewicht: 3200 g

Volume is indexed by Thomson Reuters CPCI-S (WoS).The collection of 276 peer reviewed papers covers various high-tech fields including electronics, machinery, materials, manufacturing, testing, and disciplines of physical, chemical and biological. The papers are grouped as follows: Chapter 1: Micro and Nano Fabrication; Chapter 2: Micro Sensors; Chapter 3: Micro Actuators; Chapter 4: Microfluidics and Nanofluidics; Chapter 5: Bio MEMS and Applications; Chapter 6: Nanomaterials; Chapter 7: Optical MEMS (MOEMS); Chapter 8: Power MEMS; Chapter 9: Nano Devices and NEMS; Chapter 10: Nanobiology, Nano-Bioinformatics, Nanomedicine; Chapter 11: Packaging, Sealing and Assembling Technologies; Chapter 12: MEMS/Nano Related Research.

Autoren/Hrsg.

Tang, Fei

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Biotechnologie Biotechnologie: Mikrotechnologie, Nanobiotechnologie

Inhaltsverzeichnis

Preface
Chapter 1: Micro and Nano Fabrication
Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient
Design and Fabrication of an Aerodynamic Micro-Air Journal Bearing Using Micro-Wire Electrical Discharge Machining
Fabrication and Characteristics of the Nano-Polysilicon Thin Film Transistors
Fabrication and Characterization of Tin Oxide Inverse Opal by Template Method
Fabrication of Low Stress PECVD-SiNx Film in High Frequency Mode
Fabrication of Sub-Micro Metal Tips for In-Plane Field Emission Research
Fabrication of Super-Hydrophobic Surface on Stainless Steel Using Chemical Etching Method
Fabrication of the Nanoscale Flat-Bottomed and Lamellar Structures on HOPG Surface by STM-Based Electric Lithography
Micro-Hole Drilled by EDM-ECM Combined Processing
Fabrication of ZnTiO3 Nanofibers by Electrospinning
Study on the Performance of Y-Branch Waveguide Modulator Affected by the Fabrication
A Novel Microelectrode Array Probe Integrated with Electrophysiology Reference Electrode for Neural Recording
Chromium Atomic Deposits under the Disturbance of Straight Edge Diffraction
Controllable Synthesis of Single-Crystal Monolayer Graphene on Copper Foils by Low-Pressure Chemical Vapor Deposition
Controlled Synthesis of Surface-Clean Monolayer Graphene
Cu (II) as a Catalyst for Hydrogen Peroxide System Abrasive-Free Polishing on Hard Disk Substrate
Evaluation Methods on Adhesion Property between SU-8 Photoresist and Metal Substrate
Fabrication and Properties of a New Type Micro Super-Capacitor
FEM Simulation of the Thermo-Mechanical Behavior of TSV 3D MEMS Structure
Numerical Analysis of Molding Process for Roll Imprinting Based on ABAQUS
On the Test Method of Dynamic Characteristics of MEMS Components
Research on Machining Method of Spatial Rotary Curved Surface
Research on the PDMS Surface Modification Technique
Single Phase Pyrite Synthesized via Hydrothermal Method
Thermal Analysis of a Face-to-Back Bonded Four-Layer Stacked 3D IC Model
Ultra-Precision Turning Technology of Gold Cone in Fast Ignition
Chapter 2: Micro Sensors
MEMS Relay Optimization Design Algorithm Based on Particle Swarm Optimization
Design of an Array Bionic Vector Vibration Sensor Based on MEMS
Design of 6H-SiC High Temperature Pressure Sensor Chip
Microelectromechanical Hybrid Gyroscope Design of Closed-Loop Detection Circuit Based on FPGA
Influence of Dimension and Temperature on
Capacitive Humidity Sensor
Research on Zero Bias Characteristic of FBW Gyro
A Single FBAR-Based Temperature and Pressure Sensors
The Key Technologies of SOI Micro-Accelerometer Front Release Process
Platinum Resistance Microsensor for Cryogenic Temperature Measurement
Research on the Method of Laser Trimming to Reduce the Mode Coupling Error of Micro-Machined Vibratory Gyroscopes
Projectile-Borne Meteorological Information Detection Dropsonde Integrating Micro-Sensors
Development of Data Acquisition System for Micro-Accelerometers’ Dynamic Centrifuge Test
Y-Type Branch Waveguide Used in Resonant Micro-Optic Gyro
Analysis of Intensity Variation of Laser in Resonator Micro-Optic Gyro
A Novel Noise Resistance Optical Accelerometer Based on Micro-Ring Resonant Cavity
The Design of a Membrane Biosensor
Optical Current Sensor Technology in Power System
The Effect of Casimir Force to the Performance of the Micro-Accelerometer
Capillary Condensation Adhesion Phenomena and Analysis of the Micromechanical Gyroscope
Research on Mean Filtering Algorithm in Resonant Micro-Optic Gyro Signal Processing Based on Labview
A Sub 0.8 Degree per Hour Mode-Matching MEMS Vibratory Gyroscope with Closed Loop Control for the Sense Mode
Tunable Microring Filter Based On-Chip Interrogator for Wavelength-Modulated Optical Sensor
Effect of Adsorption Stress-Induced Change in Neutral Layer Position on Static Behavior of Microcantilever Gas Sensor
A Novel Structure of Polyimide-Based Humidity Sensor Used in Low Temperature Environment
Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure
Edge Effect on Viscous Drag of the Rotor in Liquid Floating Rotational Micro-Gyroscope
Micro-Displacement Sensing Circuit for Gyroscope with Levitated Rotor
Liquid-Suspended Rotor Gyroscope Multiphase Driving Technology
Design of Hall Vehicle Speed Sensor Comprehensive System
System Simulation and Test of a Field Emission Accelerometer
A Fourth-Order MASH Sigma-Delta Modulator in Inertial Sensors
Research on Micro Twin-Bridges Catalytic Combustion Type Kerosene Gas Sensor Technology
Design of Monolithic Differential Quartz Vibrating Beam Accelerometer with Optimized Electrode Layout
Research on Characteristics of Mercury Droplet Flow in Micro Acceleration Switch
Fundamental Study of the Micro-Cantilever for more Sensitive Surface Stress-Based Biosensor
Influence of the Excitations and Detection Positions on the Sensitivity of Magnetoelastic Biosensors
Design of Conductive MWNTs/SiO2 Humidity Sensor Interface ASIC Based on AC Signals
A New Approach to Determine the Centroid of Star Spot for Star Tracker Based on MEMS-Gyro
A PID&AGC Method for Micro Vibration Gyroscope Drive System
Structural Design of 2D Piezoresistive Micro-Force Sensor
A High Bandwidth Sigma-Delta Modulator Applied in Micro-Gyroscope
Modeling of Nonlinear Stiffness of Micro-Resonator in Silic