Sonstiges, Englisch, 830 Seiten, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g
Sonstiges, Englisch, 830 Seiten, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g
ISBN: 978-3-03795-000-5
Verlag: Trans Tech Publications
This book brings together over 153 peer-reviewed papers, grouped into 6 chapters: Micro-/Nano-Fabrication and Measurement Technologies, Micro-Sensors and Actuators, Microfluidic Devices and Systems, MEMS/NENS and Applications, Nano-Material Research / Nanotubes / Nanowire Devices, Micropower Technology, Theories in Micro-/Nano-Technologies. Most of the papers are authored by Chinese researchers, and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China. The work will be of great interest to researchers, graduate students and engineers who are working in the fields of MEMS and nano-technology.
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Weitere Infos & Material
Application of Ultrasonic Stress Relief in the Fabrication of SU-8 Micro StructureDesign and Empirical Study for Coner Compensation in 25% Wt TMAH Etching on (100) Silicon WafersCharacterization of AlGaN/GaN Cantilevers Fabricated with Deep-Release TechniquesDynamic Characteristics Measurement of Silicon Micro-Cantilever in Low Temperature EnvironmentLow Cost Fabrication of Micro Glass Cavities For MEMS Wafer Level and Hermetic PackagingStudy of Under Etching Characters of Si (100) in Surfactant Added TMAHDesign and System-Level Simulation of a Novel On-Chip Test Based on MacromodelsAn Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory GyroscopeFabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer StampEffect of Micro-Injection Molding Process Parameters for Various Micro-ChannelsFabrication and Testing of SOG Structure Flat Heat Pipes with Triangle GroovesApplication of KOH Anisotropic Etching in the Fabrication of MEMS DevicesFabrication of Nano-Grating by Focused Ion Beam / Scanning Electron Microscopy Dual-Beam SystemA Monolithic MEMS Accelerometer ProcessFabrication and Performance Simulation of Microscale Thermoelectric Modules Made with Bi2Te3-Based AlloysInvestigation on Silicon-Glass Electrostatic Bonding Time ExperimentLow-Cost Fabrication Strategies of Microfluidic Device on Glass SubstrateFabrication of Nano-Aperture Hollow Tip Array for Microplasma EtchingA Capacitor-Free CMOS Low-Noise, Low-Dropout Regulator for Capacitive Micro-Machined Accelerometer Application3D Pyramidal Micropool Array Electrode for Amperometric MicrosensorDesign and Implementation of SOI Based Capacitive Microaccelerometers Without Notching EffectsFabrication and Characterisation of Polysilicon-Based Clamped-Clamped FilterStudy on Resonant Characteristics of Closed-Loop Controlled MicrocantileverStructure Design and Experiment for a Resonant Accelerometer based on Electrostatic StiffnessTwo-Dimensional Motor Based on Surface Acoustic WaveA Triple Channel High Rejection RF MEMS Switched Filter BankA Micro Spatial Light Modulator Based on Leverage PrincipleDesign, Development and Testing of Quartz Tuning Fork Temperature SensorA Biaxial Capacitive Microaccelerometer with a Single Proof-MassDesign and Fabrication of a Piezoelectric Sensor for Weighing in MotionSimulation and Design on Structure for Experimental Verification of Dielectric Charging of Millimeter-Wave MEMS SwitchesA Miniature Fluxgate Sensor with CMOS Interface CircuitryA Z-Axis Decoupled Micromachined Gyroscope with Dual FramesThe Design of AlGaN/GaN HEFT-Micro-Accelerometer and Temperature- Dependence Electrical PerformanceTemperature Characteristic of Platinum Piezoresistive Pressure SensorDesign and Simulation of Electromagnetic Two-Dimensional MOEMS Scanning MirrorMicro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric CompositesDesign of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic StiffnessStructure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS TechnologyA High Pressure Sensor with Circular Diaphragm Based on MEMS TechnologyThe Study of a Fluxgate SPICE Model Based on Schmitt TriggerSystem Design of Nonideal Fourth-Order Sigma-Delta Micromachined AccelerometerTechnique for Compensation of Temperature Drift in Thermal Excited Si-Based Resonant Pressure SensorOn-Chip Temperature-Control Technology for Silicon Micro-GyroscopeExperimentally Study of the Cushion Materials for Micro Accelerometer under Shock LoadDesign and Fabrication of Micro Oxygen SensorNanostructures and Nanodevices Special Fabrication and CharacterizationElectrohydrodynamic Printing of Conductive Patterns on Glass SlidesImprove Blood Clotting Feature of Silicon Microneedle by Silver CoatingDesign of the Cascaded Open-Channel Direct Current Electroosmotic PumpOn-Chip Bio-Micro Separation and Operation Effected on the Diamagnetic Levitation with MEMSNumerical Simulation of Dielectrophoresis Induced Electrothermal Fluid FlowResearch of Separation of Amino Acids on Micro-Free Flow Electrophoresis Chip with Voltage Applied in Two-DimensionThe Fabrication of Ag Nanostructure Array Integrated with Microfluidics for Surface Enhanced Raman ScatteringStokes' Second Problem with Velocity Slip Boundary ConditionAn Experimental Study on the Side-Opening Filling Process at the Interface between Microchannels with Different WidthsA Porous Microfluidic Chip for Protein Extraction Based on Solid Phase Extraction MethodCharacters of Particles in Copper-Water Nanofluids Made by Novel One-Step Aqueous ReductionNumerical Simulation of Electromagnetic Actuator for Impedance PumpingStudy on Ultrasonic Fusion Bonding for Polymer Microfluidic ChipsStudy of the Microfluidic-Immunoassay Chip used to Capture Cancer CellsSimulation and Experimental Study of a Porous Electroosmotic PumpExperimental Investigations of Anode Structure on the Performance of Air-Breathing ?DMFCThe Competition of the Retraction and Capillary Forces during the DNA Molecules Moving within ChannelsDevelopment of a Novel Electrochemical Surface Plasmon Resonance Instrument Based on a Mini Three Electrode Flow CellThe Fabrication and Experiment of a Four-Electrode Conductivity Sensor for Fresh WaterFabrication of PDMS Microchannels with Round Profiles Using Glycerol MoldsTheoretical Analysis and Experimental Investigation on Designing Method of Micro-Groove Heat PipeMagnetic Microfluidic MixerRapid Microfluidc Biochips Fabrication by Femtosecond Laser on Glass SubstrateRapid Detection of Methanol in an Integration Microfluidic ChipA Tire Pressure Monitoring System Based on MEMS SensorA MEMS Fluid Density Sensor Based on Trapezoidal CantileverDevelopment of the 400MHz Power Durable SAW FilterA Research on Implantable Microelectrodes for EMG Signal AcquisitionA Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric LayerDesign and Test of a Self-Oscillating Driving ASIC for a Low-Q Gyroscope Based on PI ControllerDesign and Development of the Shrapnel-Borne Meteorological Exploration System Based on MEMSResearch of Curved Artificial Compound Eyes Based on MEMS TechnologyMacro Machined Photoacoustic Non-Resonant CellResearch of the Hadamard Multiplex Advantages Using a Programmable Micro-Mirror in a Near-Infrared SpectrometerA High-Performance Fourth-Order Sigma-Delta Micromachined AccelerometerA Micro-Optical Transceiver for Interferometric Fiber Optic GyroscopePolarization-Noise in Integrated Optical GyroA Piezoelectrically Actuated Scaning Micromirror Integrated with Angle SensorsSilicon-Based Microneedle Array Electrodes for Biopotential MeasurementA Miniaturized Spectrometer Based on Optical Modulator Composed of Grating and Tunable Fabry-PerotNovel Triplexer Chip Design Combination of an Asymmetric Y Branch Waveguide and a Multimode InterferenceLateral RF MEMS Switch Based on Surface Micromachining ProcessAn AD7746-Based Data Acquisition System for Capacitive Pressure Sensor in Weather Detection ApplicationDesign and Test of MEMS Attitude Measurement Unit for Fall DetectionA High-Performance Interface ASIC for Quartz Rate SensorNew Style Four-Electrode MEMS Conductivity ChipA Curvature-Compensated, High Power Supply Rejection CMOS Bandgap Reference for MEMS Micro-AccelerometerA Four-Quadrant Analog Multiplier Based on CMOS Source Coupled PairDesigning Experiment Platform for Micro Heat ExchangersRealization of Hadamard Transform Encoding Mask Using Programmable Digital Micro-Mirror DeviceStudy of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS TechnologyDesign of High-SNR CMOS Interface Circuit for Micro-Machined GyroscopeNano-Piezoelectric Ceramics Power Supply Based on Single Electron StorageMEMS Assisted Fabrication of Cr NanobowlsEffect of Temperature on Elasticity of Silicon NanowiresDesign, Fabrication and Characterization of in-Plane Titanium Microneedles for Transdermal Drug DeliveryCharacterization of Contact and Bulk Piezoresistive Properties of Carbon Nanotube/Styrene-Butadiene-Styrene CompositeDesign of MMFCS for MAV Based on MEMS SensorImprovement on Mechanical and Piezoresistivity Properties of Cementitious Binder by Using Surface Oxidized Multi-Wall Carbon NanotubesBiocompatibility Study of Mn0.5Zn0.5Fe2O4 Magnetic NanoparticlesFabrication and Characterization of Cobalt Nanostructure-Based Microelectrodes for Phosphate DetectionFabrication of Silicon Nano-wire by OxidationDFT Study of Structure, Electronic, Optical and Magnetic Properties of ZnO and Cu-Doped ZnO ClustersTheoretic Study of the Structures and Electric Properties of N-Doped InSb NanoclustersEffect of Compressive Strain on Electrical Resistivity of Carbon Nanotube Cement-Based CompositesEffect of Wet Etching Parameter on the Diameter and Length of Silicon NanowiresAdhesive Enhancement Improved Field Emission Characteristics of Carbon Nanotube Arrays on Energetic Ion Pre-Bombarded Si SubstratesElectrodeposition of Copper Nano-Clusters at a Platinum Microelectrode for Nitrate DeterminationDesign and Research of Flat Micro Heat Pipe with Glass Fiber WickFabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT FilmsDesign, Simulation and Fabrication of an Air-Driven MicroturbomachineDesign and Fabrication of a Polymer-Based Micro Direct Methanol Fuel CellA Novel Assembly Method for a Micro Direct Methanol Fuel Cell Using Multi-Layer Bonding TechniqueA Broadband Frequency Piezoelectric Vibration Energy HarvesterFabrication of Piezoelectric Vibration Power Harvester using Bulk PZTStudy on the Performance of Gas Journal Bearings for Power MEMSAnalysis and Research of Piezoelectric Dynamic Weighing SensorMultidisciplinary Design Optimization of the 2-D MicroaccelerometerAssessing the Validity of Quantum Corrections to Molecular Dynamics Simulations of Bulk SiliconMolecular Dynamics Study of Water Structure Confined in Vibrative Silicon PlatesMolecular Dynamic Simulations of Contact Thermal Resistance between Two Individual Silicon NanowiresMicro-Stress Assembly of Fragile Miniature PartsDesign and Simulation of a Differential and Decoupled Micromachined GyroscopeAnalytical Solution of Mixed Electroosmotic and Pressure-Driven Flow in Rectangular MicrochannelsRapidly Identify the Critical Parameter of MEMS Device Based on Element Model LibraryElectrical Characteristics of a Stimulating Microelectrode-Electrolyte InterfaceAnalysis of Capillary Condensation of Vapor in Multi-Wall Carbon NanotubesParametric Research on Micro-Zigzag Slot Mechanism in OICWPerformance Analysis of a Novel MEMS Terminational Latch MechanismEffects of Phosphorus-Doping on the Microstructures, Optical and Electric Properties in N-Type Si:H Thin FilmsStability Analysis in High-Order Electromechanical Sigma-Delta AccelerometerExperimental Research on Lift up and Drag Reduction Effect of Streamwise Travelling Wave WallOptimization Based on ANSYS Electric Numerical Method for a Novel MEMS ESI-MS Ion Focusing DeviceTribological Properties of Magnesium Silicate Powders Prepared by Ball MillingTCR of the Ni-Cr Thin Film Resistors Used in Piezoresistive Pressure SensorFailure Mechanisms and Lifetime Simulation Method for Nano Scale CMOS DeviceThreshold Values Analysis of Substrate Parameters Based on MEMS Microstrip FilterThermal Transport through Solid-Solid Interface with an InterlayerDielectric Constant Measurement of Liquids Using Nanosecond-Pulsed SignalsOptical Properties of Silicon Quantum DotsGeneration and Application of the Atmospheric Pressure DC Glow Discharge Using Minor Electrodes under N2 FlowPatterns of Skylight Polarization at Different Atmospheric ConditionsThe Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon ResistorA Novel Noise Elimination Method for MEMS SensorNonlinear Ultrasonic Techniques for Testing Micro-Defects in Metal Matrix Composite StructurePiezoresistive Sensitivity and Al Ohmic Contact of Highly Doped Polycrystalline Silicon Nano Thin Films
