Büttgenbach / Burisch / Hesselbach Design and Manufacturing of Active Microsystems

1. Auflage 2011
ISBN: 978-3-642-12903-2
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 444 Seiten, eBook

Reihe: Microtechnology and MEMS

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Zielgruppe

Research

Autoren/Hrsg.

Büttgenbach, Stephanus

Burisch, Arne

Hesselbach, Jürgen

Inhaltsverzeichnis

1. Introduction.- 2. Design and Construction.- 3. Guiding and Measuring in Active Microsystems.- 4. Manufacturing and Fabrication.- 5. Microassembly.- 6.Industrial Applications.