Laser Annealing Processes in Semiconductor Technology

Theory, Modeling and Applications in Nanoelectronics
Erscheinungsjahr 2021
ISBN: 978-0-12-820255-5
Verlag: William Andrew Publishing

Buch, Englisch, 426 Seiten, Format (B × H): 152 mm x 229 mm, Gewicht: 700 g

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

Zielgruppe

<p>Materials Scientists and Engineers</p>

Autoren/Hrsg.

La Magna, Antonino

Fachgebiete

• Technische Wissenschaften Technik Allgemein Technische Optik, Lasertechnologie
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Halb- und Supraleitertechnologie
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik

Inhaltsverzeichnis

1. Historical evolution of pulsed laser annealing for semiconductor processing
Guglielmo Fortunato, Luigi Mariucci, Alessandro Pecora, Vittorio Privitera, and Frank Simon
2. Laser-matter interactions
Spyros Stathopoulos and Dimitris Tsoukalas
3. Atomistic modeling of laser-related phenomena
Luis A.Marqués, María Aboy, Pedro López, Iván Santos, Lourdes Pelaz, Giuseppe Fisicaro
4. Laser annealing applications for semiconductor devices manufacturing
Karim Huet
5. Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors
Ray Duffy, Enrico Napolitani, and Fuccio Cristiano
6. Continuum modeling and TCAD simulations of laser-related phenomena in CMOS applications
Salvatore Francesco Lombardo, Ioannis Deretzis, Alberto Sciuto, and Antonino La Magna
7. Laser engineering of carbon materials for optoelectronic applications
Frédéric Antoni and François Stock
8. Optical hyperdoping
Wenjie Yang, Shao Qi Lim, and Jim S. Williams
9. Laser ultra-doped silicon: Superconductivity and applications
Francesca Chiodi, Richard Daubriac and Sébastien Kerdilès

Über Autor(innen)

La Magna, Antonino
Antonino La Magna received his master's in physics (cum laude) and his Ph.D. in Physics at the University of Catania in1992 and 1996, respectively. Since 1999, he has been a member of the permanent staff at the Institute for the Microelectronics and Microsystems of the Italian National Council of Research (CNR-IMM), where he is responsible of the computational team and resources (1999-Today). Currently, he also leads the research group on advanced processes (2010-Today). He is and has been coordinator and responsible for the CNR-IMM of several international projects and contract research on behalf of industry.
He has authored over more than 270 publications in international journals in the fields of theoretical solid state physics, technological processes and process and device simulations, and he is a frequently invited speaker at international conferences.