Scanning Electron Microscopy

Physics of Image Formation and Microanalysis
2. completely rev. and updated Auflage Softcover version of original hardcover Auflage 1998
ISBN: 978-3-642-08372-3
Verlag: Springer

Buch, Englisch, Band 45, 529 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 814 g

Reihe: Springer Series in Optical Sciences

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Zielgruppe

Research

Autoren/Hrsg.

Reimer, Ludwig

Weitere Mitwirkende

Hawkes, P.W.

Fachgebiete

• Naturwissenschaften Physik Elektromagnetismus Mikroskopie, Spektroskopie
• Naturwissenschaften Physik Angewandte Physik
• Naturwissenschaften Physik Thermodynamik Festkörperphysik, Kondensierte Materie
• Naturwissenschaften Physik Thermodynamik Oberflächen- und Grenzflächenphysik, Dünne Schichten

Inhaltsverzeichnis

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.