Formation of Silicon Nitride

Erscheinungsjahr 2005
ISBN: 978-0-87849-190-2
Verlag: Trans Tech Publications

Sonstiges, Englisch, 960 Seiten, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g

The elements: Si, N, O, C and H, have strong chemical affinities for one another. Under the correct conditions, Si-N bonding will occur in almost any Si-N-(O/C/H), and many related, reaction systems; although Si-O and Si-C are formidable competitors to Si-N. The most favored Si-N compound is stoichiometric Si3N4. It comes in three common varieties. How they interrelate, how one finds them and (above all ) how one makes them - and how sometimes they just happen to form - are the subjects of this book, with due attention being paid to closely related matters.

Autoren/Hrsg.

Sangster, Raymond C.

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde

Inhaltsverzeichnis

Part A. In the Beginning. Chapter A-1. From the Cosmic to the MundaneChapter A-2. Book Purpose and Design, Writing ConventionsChapter A-3. Historical Comments re Silicon Nitride StudiesChapter A-4. Natural Occurrence of Si3N4Chapter A-5. Major Reviews on Formation of Silicon NitridePart B. Technical Context of Silicon Nitride FormationChapter B-1. The Si-N SystemChapter B-2. Si3N4 Phases and CrystallographyChapter B-3. Phase Chemistry of a-Si3N4 ? "-Si3N4 ? $-Si3N4Chapter B-4. High Pressure Phase Chemistry of Si3N4Chapter B-5. Silicon Nitride Solid SolutionsChapter B-6. Phase Diagram Sources for Si3N4 & SiAlON Ceramic SystemsChapter B-7. Thermodynamics of Si3N4Chapter B-8. Self-Diffusion in Si3N4Chapter B-9. Compositional and Phase Analysis of Si3N4Chapter B-10. Si3N4 Toxicology and SafetyChapter B-11. Engineering Aspects of Silicon Nitride ProductionChapter B-12. General Comments on Formation Chemistry of Silicon NitridePat C. Si3N4 Products, Uses and MarketsChapter C-1. Survey of Applications and Markets for Si3N4 MaterialsChapter C-2. Sintered Silicon Nitride CeramicsChapter C-3. Overview of Production of Silicon Nitride PowdersChapter C-4. Overview of Si3N4 Whiskers, Fibers, and FilamentsChapter C-5. Overview: Si3N4 Films, Coatings, Membranes, Massive CVDChapter C-6. Si3N4 Products by Transformation of Si3N4 Source MaterialsIllustrative Applications I: SRBSN in Automotive Technology.Part D. Si3N4 by Reaction of Si(cr) Surfaces and N-SpeciesChapter D-1. Comments re Si(s,R,g)/N-Species Preparative ReactionsChapter D-2. Si3N4 from Si(cr/Surface) /N2(g)Chapter D-3. Si3N4 from Si(cr)/Activated NitrogenChapter D-4. Si(cr)/N-Ions I. Basic Phenomena of Si3N4 FormationChapter D-5. Si(cr)/N-Ions II. Ion Plating of Si3N4 Surface FilmsChapter D-6. Si(cr)/N-Ions III. Ion Implantation of Buried Si3N4 LayersPart E. Si3N4 Powder Formation from Si(Powder)/N2(g)Chapter E-1. Basic Phenomena in Si3N4 Formation via Si(Powder)/N2(g)Chapter E-2. Si3N4 Powder from Si(powder)/N2/(Impurities & Additives)Chapter E-3. Preparation of Si3N4 Powder via Si(powder)/N2Illustrative Applications II: SRBSN in Modern Diesel Engines.Part F. Fabrication of Reaction Bonded Silicon NitrideChapter F-1. RBSN Introduction and SummationChapter F-2. Reaction Bonded Silicon Nitride BasicsChapter F-3. RBSN Si Powder Effects and ProcessingChapter F-4. RBSN Green Shape Effects, Forming, Presintering, MachiningChapter F-5. RBSN NitridationChapter F-6. RBSN Product-Process ObservationsChapter F-7. RBSN Coating and ImpregnationChapter F-8. Variant Versions of Reaction Bonded Si3N4Chapter F-9. Doped/Filled/Reinforced RBSN CeramicsChapter F-10. SRBSN: Post-Sintering of RBSNPart G. Si3N4 from Si/N2 Under Vigorous ConditionsChapter G-1. Si3N4 Formation via Si(R)/N2 ReactionsChapter G-2. Si(powder)/N2(g) Combustion Synthesis of Si3N4Chapter G-3. SHS Production of Si3N4 Powders, Whiskers and FibersChapter G-4. Si3N4 by Si/N2 Reactive SputteringChapter G-5. Si3N4 via Si/N2 Reaction in Thermal PlasmasChapter G-6. Si3N4 Formation via Si(g)/N2, N, N-Plasma, N-Ion ReactionsChapter G-7. Si3N4 Formation via Si+/(N-Plasma, N-Ion) ReactionsChapter G-8. Mechano(-electro)chemical Nitridation of Si PowderPart H. Si3N4 Formation by Reaction of Si with N-CompoundsChapter H-1. Introduction to Si/N-Compound ReactionsChapter H-2. Si3N4 Formation by Thermal Reactions of Si(s)/NH3(g)Chapter H-3. Si3N4 via Stimulated Reactions of Si(s)/NH3(g)Chapter H-4. Si3N4 Formation in other Si/NH3 Reaction SystemsChapter H-5. Si(powder)/NH3(g) Powder Production in Thermal PlasmasChapter H-6. Si3N4 from Si(s) Plus N-N Bonded and other N-CompoundsPart ?. Si3N4 by Nitridation of Si-O Based MaterialsChapter ?-1. Si3N4 Formation via Sio(g,s)/(N2,NH3)/(H2,C,CH4)Chapter ?-2. Si3N4 via C-Free Nitridation of SiOxHy, SiO2, Si2N2OChapter ?-3. SiO2/C/N2: Si3N4 by Carbothermal Nitridation of SiO2Chapter ?-4. Si3N4 via other SiO2 Carbothermal Nitridation SystemsChapter ?-5. SiO2 Carbothermal Nitridation Impurity/Additive EffectsChapter ?-6. Si3N4 via Carbonitridation of Si-O Containing MaterialsPart J. Si3N4 Formation Si-N Based MaterialsChapter J-1. Introduction to Si3N4 from Si-N Based MaterialsChapter J-2. Si3N4 Formation by Reactions of Si-N MaterialsChapter J-3. Si3N4 from Pyrolysis/Nitridation of Si-N-H Materials, GeneralChapter J-4. Si3N4 Preparation by Pyrolysis of Si(NH)2Chapter J-5. Si3N4 via Decomposition of Other Si-N-X CompoundsPart K. Comparative Overview and Summary of Si3N4 CVDChapter K-1. Chemical Vapor Deposition of Si3N4: FundamentalsChapter K-2. Methods for CVD of Si3N4 Thin FilmsPart L. Si3N4 by CVD Nitridation of Si-H CompoundsChapter L-1. Preamble: Si3N4 CVD from SilanesChapter L-2. Si3N4 Chemical Vapor Deposition from SiH4/N2Chapter L-3. Si3N4 from SiH4/NH3 Thermal ReactionsChapter L-4. Si3N4 Formation via Stimulated CVD from SiH4/NH3Chapter L-5. SiH4/NH3(g) Formation of Si3N4 PowderChapter L-6. Si3N4 Formation from SiH4/N2H4(/NH3,N2,H2)Chapter L-7. Si3N4 via Other SiHx CVD Nitridation SystemsPart M. Si3N4 by CVD Nitridation of Si Halides and HalosilanesChapter M-1. Preamble Re Si3N4 CVD from Si Halides and HalosilanesChapter M-2. Si3N4 via CVD Nitridation of Silicon FluoridesChapter M-3. Si3N4 Formation via SiCl4/(N2,NH3)(/H2,Ar,He) ReactionsChapter M-4. Si3N4 from SiCl4/NH3 Reactions in Thermal PlasmasChapter M-5. Si3N4 Formation in Other SiClx Nitridation SystemsChapter M-6. Si3N4 by Nitridation CVD from SiHCl3Chapter M-7. Si3N4 Formation via SiH2Cl2 NitridationChapter M-8. Si3N4 by CVD Nitridation of SiH3Cl, SiBr4, SiHBr3, SiI4Part N. Si3N4 Formation in Si-C-N SystemsChapter N-1. Si3N4 from Si-C-N-H(-Cl) CVD Reaction SystemsChapter N-2. Si3N4 via Pyrolysis/Nitridation of SiC and Si-C-N MaterialsChapter N-3. Si3N4 from Pyrolysis/Nitridation of Organosilicon PolymersPart O. Si3N4 Formation in Si-N-X Systems, X = B, P, S, Fe, OtherChapter O-1. Si3N4 Formation in Si-N-(B, P, S) SystemsChapter O-2. Si3N4In Situ Formation in Iron and Steel AlloysChapter O-3. Si3N4 Preparation by Reactions of Fe-Si Alloys and N2Chapter O-4. Si3N4 Formation in Non-Fe Metal?Silicon?Nitrogen Systems