Micro-Nano Technology XVI

Selected, peer reviewed papers from the 16th Annual Conference and 5th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2014), August 31-September 3, 2014, Chengdu, China
2. Auflage 2015
ISBN: 978-3-03835-462-8
Verlag: Trans Tech Publications

Buch, Englisch, 1426 Seiten, Format (B × H): 170 mm x 240 mm, Gewicht: 2460 g

Collection of selected, peer reviewed papers from the 16th Annual Conference and 5th International Conference of the Chinese Society of Micro-Nano Technology (CSMNT 2014), August 31-September 3, 2014, Chengdu, China. The 226 papers are grouped as follows: Chapter 1: Materials and Technologies in the Scale of Micro and Nano; Chapter 2: Micro/Nanofluids Research and Technologies; Chapter 3: Measurements, Sensors and MEMS;Chapter 4: Micro Actuators and Devices; Chapter 5: Optics in the Scale of Micro and Nano;Chapter 6: Energy Harvesting, Power Supply and Technologies for Fuel Cells; Chapter 7: Bioresearch and Biomedical Engineering

Autoren/Hrsg.

Tang, Fei

Fachgebiete

• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Medizin | Veterinärmedizin Medizin | Public Health | Pharmazie | Zahnmedizin Medizin, Gesundheitswesen Medizintechnik, Biomedizintechnik, Medizinische Werkstoffe
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Sonstige Technologien | Angewandte Technik Medizintechnik, Biomedizintechnik

Inhaltsverzeichnis

Preface
Chapter 1: Materials and Technologies in the Scale of Micro and Nano
Study of PSG Thickness Uniformity Influencing Factors in LPCVD
Anisotropic Elastic Properties of Chiral Sculptured Thin Films at Micro-Scale Evaluated by Resonance Frequency Spectra
The Dilute Magnetic Properties of Monolayer MoS2 Doped with Transition Metal Fe and VA Atoms
Strategies for Defect-Free and Deep Wet Etching of Pyrex 7740
Effect of Hydrophilic and Hydrophobic SiO2 Particles on Performances of PI/Al2O3 Composite Films
Synthesis and Characterization of Topological Insulator Bi2Te3 Nanowires
Electronic and Magnetic Properties of Rare-Earth Atoms Absorbed on Graphene Sheet: A Theoretical Study
Melt Electrohydrodynamic Direct-Writing Micro/Nano Fiber with Restriction of Heated Sheath Gas
Experimental Study on WEDM Machining of PCD and PCBN Compacts
Wet Anisotropic Etching Characteristics of Si{100} in TMAH+Triton at near the Boiling Point
Hierarchically Ordered Porous Carbon as a Host Material for Energetic Composites
TCAD Study of the Raised SiGe Source/Drain in 40nm PMOS
Adsorption of Silver Nanoparticles on Modified Surfaces
W-Band Quadrupler Based on Multi-Chip Module and Schottky Barrier Diodes
Intermediate Layer Bonding for Silicon and Piezoelectric on UV Adhesive
Quantitative Production of Charges with a Carbon Nanotubes Coated Electrode Based on Trichel Pulses
Band Engineering of Graphene Nanomesh Field Effect Transistor under Multiscale Simulation Framework
Growth and Magnetic Properties of Three-Dimensional Firtree-Like Cobalt Microcrystals with Hierarchical Dendritic Superstructures
The Thermal Decomposition Behavior of Graphene Oxide/HMX Composites
Facile Fabrication of Super-Hydrophobic Surfaces by Spray PTFE
Frequency Characteristics Research for the Negative Resistance Oscillations Phenomenon of a Silicon Magnetic Sensitivity Transistor
Large-Scale Synthesis and Microwave Absorption Properties of CoFe2O4/ Co0.4Zn0.6Fe2O4 Hollow Nanospheres
Research of Magnetic Characteristics of the Split-Drain MAGFET Based on Nano-Polysilicon TFTs
Graphene Field Effect Transistor’s Circuit Modeling and Radio Frequency Application Study
Synthesis and Dispersity of YBCO Powder Produced by Oxalic Acid Precipitation Method
Influence of Defects on the Young's Modulus of [110] Silicon Nanowires with Different Cross Sections
Sintering Behavior and Electrical Property of Surface Treated Silver Nanoparticle for Electronic Application
Study on the Etching Technique of Non-Photosensitive Polyimide
An Investigation on Resistive Switching Characteristics Induced by HfOx and Electrode Interfaces
Study on Internal Stress in Micro-Electroformed Layer
Low Temperature Eutectic Alloy Bonding Used in MEMS-Based Solid Propellant Microthrusters Array
Simulation and Test of through Silicon Vias Impacted by Large Current Pulse
Preparation of Strongly Hydrophobic Film with Large Area and Flexibility Based on Micro Fabrication
Preparation of TiO2 Nano-Film by Anodic Oxidation Method and its Hydrophobic Modification
Fabrication and Thermal Performance of Copper Pillars Modified Micro Heat Pipe (MHP)
Research on TSV Dry Etching Technology
Research on Microstructure and Wear Resistance of Cast-Penetrated Layer Strengthened by Nano-Sized TiN Intermediate Alloy
Research on Delamination of Plastic Packaging Device during Reflow Soldering
Preparation of Nano a-Fe2O3 Powders and Characterization of their Photo-Catalysis Capacities
Research on the Preparation of Nanoporous Copper Using Taguchi Method
Preparation of Mn-Zn Ferrite Flake Absorbent by Self-Reactive Spray Forming Technology
Intermolecular-Interaction and Mechanical Properties of MNs-Plasticizer Modified 2,4,6-Trinitrotoluene/1,3,5-Trinitrohexahydro-1,3,5-Triazine Molten-Energetic-Composite(MEC)
Research Survey of Electroformed Nickel Material Properties Used in MEMS
The Effect of Thermal Accumulation to the Field Emission Properties of the Carbon Nanotubes
Effect of Ammonia as an Inert Solvent on Structure and Separation Performance for Oil/Water Mixtures of PVDF Porous Membranes
Size Effect of Piezoelectricity in ZnO Nanowires: A First-Principles Study
Ejection and Motion Behaviors Simulation for Multi-Jet Electrospinning
Measurement on the Mechanical Properties of SiC Thin Films Based on Square Thin Films Theory
Optimization of Chemical Mechanical Planarization Process of High Enrichment Slurry Under Low Pressure
Effect of Reaction Inhibitors on Synthesized Silver Nanostructures via Solvothermal Method
Effects of NaOH Concentration on Section Structures of Oxide Films Based on TC4 by Anodic Oxidation Process
A Novel High Precision Analytic Potential Function for Diatomic Molecules
The Simulation and Analysis of Current Crowding and Joule Heat in Flip Chip Solder Bumps
Effects of n-Type Dopants on Electronic Properties in 4H-SiC
Fabrication of Ultrasmooth Polymer Films by Concentration Control and Spin Speed Adjustment
Nanopore in C-S-H Gel Stability Analysis of Hardened Cement Pastes
Simulation and Typical Application of Multi-Step Diffusion Method for MEMS Device Layers
Synthesis of Nano-Al with Fe2O3 Nanowires to Realize Core-Shell Composite Materials Arrays Based on Colloidal Templates
Evaluation of the Stability on the New Alkaline Copper Bulk Slurry
Research on Low Temperature Anodic Bonding Based on Interface Pretreatment of Dielectric Barrier Discharge Plasma
The Study on the Selectivity Ratio of SiC/Epoxy Resin Based on ICP Etching
High-Efficiency Preparation of N-Doped Titania with High Visible Light Photocatalytic Activity Using Composite N Precursor
UV Photocatalytic Digestion Utilizing TiO2 Nano-Fiber for the Determination of Total Phosphorus
Research of Thin Film for Laser Polarization Beam Splitter
Micro Laser Joining between Dissimilar Materials of 200µm Thick TiNi Alloy and Stainless Steel and the Joint’s Electrochemical Behavior
Electrokinetic Research on the Dispersion Behavior of Nano-Ceria Particles in Concentrated Suspensions
Study of SiC’s Mechanical Property Variance Caused by Film Thickness
Experimental Study on the Relationship between Dislocation Density and Internal Stress in Micro Electroforming Layer
Influence of Hybrid Fibers on Flexural Properties of Ultra High Toughness Cementitous Composites with Nano-SiO2
The Influence of Polyhedral Oligomeric Silsesquioxane on Heat Resistance and Curing Kinetics of Potting Materials
Study on Mechanism of Phase Forming in Ni+ Implantation into Ti6Al4V at Elevated Temperature
Preparation and Mechanical Properties of Ultra-Fine Grain Medium-Carbon Steel Based on Equal-Channel Angular Pressing
Chapter 2: Micro/Nanofluids Research and Technologies
Tribological Properities of Oil-Based ZnO Nanofluids
Performance Investigation of TiO2 Nanofluid Coolant for Automobile Cooling Applications
The Simulation and Experimental Analysis of Hydrodynamic Focusing Effect inside a Rectangular Microchannel
Threshold Model of Micro-Fluidic Inertial Switch Based on Orthogonal Regression Design
Effect of Flow Rate of Slurry in Micro-Channels on the Consistency of Polishing Rate
Discrimination of Low-Grade Oil from Edible Oil by a Microfluidic Device
Effect of Elliptical Dimples on Hydrodynamic Lubrication
Chapter 3: Measurements, Sensors and MEMS
Study of Bandwidth Expansion Based on Electrochemical Vibration Sensor
A Novel Micro-Machined Out-of-Plane Resonant Accelerometer with Differential Structure of Different-Height Resonant Beams
The Research of Turn-On Time for Silicon Micromechanical Gyroscope on a Chip
3D Indoor Positioning System Based on MEMS Sensors
Analysis Temperature Characteristics of Atmosphere Pressure Sensor Caused by Residual Gas
Q-Factor Improving of Film Bulk Acoustic Wave Resonator for Chip-Scale Atomic Clocks
Study on a Planar Interdigitated MEMS Supercapacitor Using Modeling and Simulation Method
Passive Acoustic Localization Based on MEMS Microphone Arrays
An Electromagnetic Vibrating Ring Gyroscope Using SOI-MEMS Technology
The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110
The Influence of Die-Attach Adhesives on the Packaging of MEMS Accelerometer
High Resolution Micro-Displacement Sensing Circuit for Rotor Micro-Gyroscope
Simulation and Experimental Verification of Silicon Microgyroscope's Closed-Loop Driving Circuits Based on Cadence
Design of 16 bit 200kHz Feedforward Sigma-Delta ADC Applied in Silicon Gyroscope
Advancements in Micro-Structure with Multiple Stress Concentration Region for Bionic Vector Hydrophone
High-Precision Quadrature Signal Generator for Digital Demodulation of MEMS Gyroscope
Study of Thin Film Pressure Sensor by Magnetron Sputtering
FPGA-Based Test Equipment for System-Level MEMS Switch Series
Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8
Passive Wireless Multi-Parameter Sensor System for Hermetic Environment Monitoring
Statistical Analysis and Yield Enhancement of MEMS Devices by Considering Multi-Process Variations
Effects of Hall Output Probes Shape on Magnetic Characterization of Hall Magnetic Field Sensor Based on MOSFET
Chip-Level Active Temperature Control for Improving Temperature Robust of a Micro-Gyroscope
A 16 Bits 500 kHz Sigma-Delta DAC for Silicon Micro Gyroscope
An Integrated Pressure and Magnetic Field Sensor Based on Piezoresistance Effect
The SOI Micro-Accelerometer Fabricated by Sacrificial Process
Noise Analysis of Silicon Microgyroscope's Transimpedance Amplifier Interface Circuit
Micromachined Tri-Axis Capacitive Accelerometer Based on the Single Mass
Multi-Chip Module Design of a MEMS Air Pressure Sensor
A Modulated Feedback Approach to Improve Closed Loop MEMS Accelerometer Bias Instability
A Second Differential Bandpass Filter with Tuning Center Frequency and Constant Q
Trajectory Guidance Law for MAV Based on MEMS Sensor/GPS
A Feed-Forward Sigma-Delta Modulator Applied in Silicon Gyroscope
A Novel Capacitive Temperature Sensor for Real-Time Monitoring of Temperature in the Silicone Oil Fan Clutch
Active Disturbance Rejection Control Design for Fast AFM
Plastic Strain Effect in Progressive Multi-Cycle Nano-Indentation Measurement
Micro-Fabricated Pre-Concentrator Filled with Single-Walled Carbon Nanotubes as Adsorbent Material
Research on Rapid Detection and Accounting of Small Particles in Marine Hydraulic Oil
Dissemination of Micro-Gram Weights from 500 µg to 50µg Based on Automatic Mass Measuring System
Design and Fabrication of High Vacuum Gauge Based on Micro Hotplate
Analysis of Impact of Bottom Electrode Position on Dynamic Pull-In Parameters of Microcantilevers
Fabrication and Formaldehyde-Sensing Property of Quartz Crystal Microbalance (QCM) Coated with PVP-MWCNTs Composites
A Micro Direct Formic Acid Fuel Cell with PDMS Fluid Flow Plates
A Novel Microfluidic Time Gate for Controlling Flow of Liquids
Microfluidic Amperometric Detection Sensor with Integrated Ag/AgCl Reference Electrode
Optimization of Microfluidic Chip Bonding Technology Based on Polydimethylsiloxane
Applied Research on Self-Sensing Micro-Flow Injection Device Based on Piezoelectric Ceramics
Iron Wear Particle Content Measurements in Process Liquids Using Micro Channel – Inductive Method
Fluid Dynamic Analysis on Solar Heating Error of Radiosonde MEMS Humidity Measurement
Experimental Study on Velocity of Flyer Based on Silicon
A New Method of Design and Verification of Digital Silicon Gyroscopes Closed-Loop Driving System Based on MicroBlaze
Design and Fabrication of a SOI Optical Waveguide Sensing Platform for Biochemical Sensor Application
The Research on Electroplating Technology Used for RF Micro Inductor Coil
Study on Magnetization and Detection the Metal Particle in Harmonic Magnetic Field
The Buckling Simulation of Planar W-Form Micro-Spring in MEMS Safety and Arming Device
Design‚ Optimization and Simulation of an Electric Field Microsensor Based on PZT Piezoelectric Interdigitated Cantilevers
Design and Application of Digitally-Programmable Delay-Time Microchip in Detonating System
A Traceable Metrological Method with Nanometer Scale Resolution for Micro-Structure
Accurate and Traceable Calibration of the Stiffness of Various AFM Cantilevers
Design of Minimal Capacitance Detect Circuit for MEMS Capacitive Sensor
Micro-Spring’s Variable Stiffness Design and Characteristics Analysis
Fabrication Process and Electro-Thermal Modeling for the Cathode of the CMOS-Compatible Hot-Filament Vacuum Gauge
A New Design of a Piezoelectric Triaxial Micro-Accelerometer
UVC-Thermal Coupled Digestion without Oxidant for the Detection of Total Phosphorus
Fabrication of SU-8 Microneedle Based on Backside Exposure Technology
Analysis on the Effect of Machining Error on the Vibration of MEMS Device
A Variable Resistor Micro System Based on Electro-Explosion
Design and Experimental Study of a Composite Materials Micro-Deformation Measurement Device
A Low-Frequency Filter in Inertial Applications
Experimental Investigations on New Characterization Method for Giant Piezoresistance Effect and Silicon Nanowire Piezoresistive Detection
Application of Magnetic Filter Technology in Improving the Precision of a Micro Attitude Reference System
Intelligent Logistics Monitoring Microsystem Based on STM32
Nondestructive Microscopy Test on Damage of Waterproof Material in Underground Engineering
A Robust Adaptive Angle Algorithm for Imaging Bionic Polarization Navigation Sensor
A Nano-Cantilever Bending Method for Interface Cracking in Nanoscale Materials
The Displacement Characteristics of Piezoelectric Ceramic Micro Actuators Evaluated by Laser Interferometer
On the Temperature-Related Mechanical Properties of UV-LIGA Nickel Material
Design and Experiment Research on MEMS Vector Hydrophone Vibration Damping Structure
The Test and Simulation Modeling of Micro Scale Solid Particles Fuel Cloud Dispersal under High Dynamic
Chapter 4: Micro Actuators and Devices
Performance-Enhanced Heat Converter Used in FPA Utilizing a SiOx/Al Corrugated Micro-Cantilever Actuator
Modeling of Hysteresis in Piezoelectric Actuator Using Linear Play Operator Adaptive Filter
The Dynamic Characteristics Research of MEMS V-Shaped SiO2/Al Electrothermal Actuator
The Parametric Analysis of the Threshold Value Judging Mechanism in MEMS Safety and Arming Device
The Error Analysis of Micro-Flow Self-Sensing Actuator
Analysis of Harmonic Distortion of Sigma-Delta Modulator
The Parametric Analysis of the Lock-Releasing Mechanism in MEMS Safety and Arming Device
Theoretical Investigation of the Electronic Properties in BN Nanowires
Dynamic Modeling and Output Characteristic Analysis of a Micro Bistable Piezoelectric Generator
Impact of Cross-Section and Size on Vibration of Silicon Nanowires
Controlled Encapsulation of Micron-Sized Beads in a Droplet Based on Pulse Inertia Force Driving of Micro-Fluids
Interference Fit Assembly of Micro-Parts Based on Microscopic Vision and Force
Scalable Electrical Model and Performance Analysis of a Novel Bar TSV Structure
Experimental Investigation of Thermal Conduction Performance on Silicon-Based Micro Flat Heat Pipe
Analysis of Effective Field Emitting Angle for Spindt Cathode
Fabrication of Convex Plate-Shaped Micro Tool Electrode and its Application in Micro Hole Machining by ECM
Design of Micromachining System Based on Nanosecond Pulsed Laser
Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser
Constructing Dual Band Metamaterial Absorbers at Mid-Infrared by Employing Multi-Resonant Structures
Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage
Effect of Undercut on the Characterization of the Mechanical Properties of Silicon Nanocantilevers with Dynamic and Static Test
Implementation of Convolutional Encoder in Quantum-Dot Cellular Automata
Chapter 5: Optics in the Scale of Micro and Nano
Theoretical and Experimental Studies on Microcavity Organic Light-Emitting Diodes with Different Emitters
A Method to Fabricate Thin Micro Silicon Cantilever Based on Optical Lithography with AZ 1518
Design and Experiment of Phase Laser Ranging System Based on MEMS Mirror for Scanning Detection
High-Frequency InP-InGaAsP Heterojunction Phototransistor Employing a UTC Structure
A Compact Infrared Gas Sensor Based on an Asymmetry Gas Cavity
Surface Micromachined Mirror Based on Pre-Stress Comb-Drive Actuator
Design and Simulation of MEMS Mirror Based 3D Shape Measurement System
Chapter 6: Energy Harvesting, Power Supply and Technologies for Fuel Cells
The Design of an Interface Circuit for Micro-Electrostatic Vibration Energy Harvesters and Super-Capacitor
Fabrication of Aluminum Nitride Films by Reactive Pulse DC Magnetron Sputtering for Vibration Energy Harvester
Novel Wind Energy Harvesting Device for City Building Based on ZnO Films Array
VCuxOy Thin Film by Magnetron Sputtering as Cathode Material for Thin Film Lithium-Ion Microbatteries
High Performance Supercapacitor Electrode Materials Based on Activated Carbon and Conducting Polypyrrole
Electrohydrodynamic Atomization Deposition of Fuel Cell Catalyst-Coated Membrane with Structure and Material Gradient Variation
Secondary Synthesis of Microporous Heteroatoms Y Zeolite and their Hydrodesulfurization Properties for Model Fuel
A 3D All-Solid-State Thin Film Microbattery with Inverted Pyramid Arrays
Formation of Membrane Electrode Assembly for High Temperature Methanol Fuel Cells
Asymmetric Design of Anode and Cathode Current Collectors for Micro Direct Methanol Fuel Cells
Study on the Energy Harvesting Performance of PE Cantilever Beam
To Improve Micro-Planar-Magnetic Generator Performance Based on Addition of Magnetic Material
Electrospun PVDF/PMMA/SiO2 Membrane Separators for Rechargeable Lithium-Ion Batteries
Electrospun SnO2-Graphene Composite Nanofibers as High Performance Anode for Lithium Ion Batteries
Numerical Optimization Approach of the Gap between the Magnet and Coil for Electromagnetic Vibration Energy Harvesters Design
Design and Comparison of Micro Electromagnetic Vibration Energy Harvesters
Corrosion Behavior of SAMs Modified Silver-Coated 316LSS as PEMFC Bipolar Plates
Chapter 7: Bioresearch and Biomedical Engineering
Stabilization of Pickering Emulsions by Bacterial Cellulose Nanofibrils
Enrichment Efficiency Optimization of Dielectrophoresis Cell Chip Based on Interdigitated Microelectrodes Array
Functionalization of Mesoporous SBA-15 with APTES by Co-Condensation and its Effect on Immobilization of Candidarugosa Lipase
Fabrication of a Pendulous Resonant Micro-Machined Biosensor for Direct Liquid Detection

In Situ Synthesis of the Hollow Silica Microspheres with Porous Surface by Using Chemical Modified Pollen Grains as Biotemplate
CMOS Amplifier for Neural Signal Recording Applications
Analysis and Simulation of a Planar Microelectrode Structure for Dielectrophoretic Manipulation of a Single Cell and Cell Cluster
A Biological 3D Printer for the Preparation of Tissue Engineering Micro-Channel Scaffold
Specific Detection of Staphylococcus Enterotoxin B in Milk Using Piezoresistive Cantilever Aptasensor
Biological CAD/CAM/3D Printing Integrated Molding Platform and System Building
A CMOS Automatic Gain Control Circuit for Biomedical Applications
Facile Preparation of Cu/TiO2 Nanocomposite via Photocatalysis and their Antibacterial Performance
Design of a Microfluidic Chip for Enrichment of Circulating Tumor Cells
Biological Effect of Single Wall Carbon Nanotubes on Skeletonemacostatum and Prorocentrum donghaiense in Seawaters
Expansion Performance of Novel Balloon-Expandable Stent for Tapered Vessel
Synthesis of Silica Modified Large-Sized Hydroxyapatite Whiskers by a Hydrothermal Co-Precipitation Method
Flow Field Analysis for Plant Vessel and Bionic Structural Microfluidic Chip
The Application of Micro-Flow Extrusion Forming Technology in the Denture Preparation
Yeast Cells Immobilization in Microfluidic Channels Based on a Self-Polymerized Nano-Film of Poly(Dopamine)
An Ultrasonic Micro Knife Based on Triangular Silicon Horn Chip
Preparation and Characterization of Tissue Engineering Scaffolds by Composite Molding of 3D Printing and Electrospinning
Pretreatment with Huperzine A-Loaded Poly(lactide-co-glycolide) Nanoparticles Protects against Lethal Effects of Soman-Induced in Mice

Über Autor(innen)

Ed. Fei Tang