Micro-Nano Technology XIII

Erscheinungsjahr 2012
ISBN: 978-3-03785-364-1
Verlag: Trans Tech Publications

Buch, Englisch, 470 Seiten, Format (B × H): 170 mm x 240 mm, Gewicht: 1000 g

Volume is indexed by Thomson Reuters CPCI-S (WoS).These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology.

Autoren/Hrsg.

Wang, Xiao Hao

Fachgebiete

• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Biotechnologie Biotechnologie: Mikrotechnologie, Nanobiotechnologie
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme

Inhaltsverzeichnis

Preface
Chapter 1: Micro/Nano Transducer/Actuator/Robot
The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid
A Monolithic Integrated Pressure Sensor
A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope
Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports
Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror
Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane
New Isolation Optimization Method of RF MEMS Capacitive Switches
Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors
MEMS Grating with Interdigitated-Comb Structure
Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor
Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes
Optimal Design of Micro Plastic Heat Radiator
A Miniaturized Piezoelectric Wind Flutter Generator
Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS
A Flush-Mounted Resonant Ice Detection Sensor with High Sensitivity
Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers
Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology
Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films
Heating Carve Technique for Polymer Microfluidic Microchannel
Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness
MEMS Bionic Vector Hydrophone
Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator
Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer
An Interface for Low-Q Micromachined Gyroscope
A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer
Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide
A Simple Method for Depositing DNA on the Mica
A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution
Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical Gyro
Analysis and Improvement of a 3 Axis Accelerometer
A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror
Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes
Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope
Design and Simulation of Multi-Microchannel for Thermal Wind Sensor
Study of High Sensitivity Sensor Based on the Principle of Photoionization
Design and Simulation of a Capacitive Biaxial Microaccelerometer
Chapter 2: Microfluidic Devices and Systems
Air Gap Flux Density for the Planar Motor
A High-Performance Mash Fourth-Order Sigma-Delta Modulator
Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation
A Novel Preconcentration Method for Microchip Based Electrophoresis and its Numerical Simulation
Simulation of Injection Molding of Ultra-Thin Light Guide Plate with Hemispherical Microstructures
Design of a MEMS Broadband Microstrip Patch Antenna Based on Minkowski Fractal Boundary
Investigation on Transmittance and Uniformity of Light Diffuser Plate of Scattering Optical Transmission Polymer
Analytical Model of Fluxgate System
Optimal Design and Simulation of a Cross-Plane Micro-Thermoelectric Generator
Eliminating the External Libration Sound for the Optical Microsphere-Taper Coupling Structure
Development of a Portable Phosphate Detection System Using Cobalt Based Microelectrodes
Effect of Micro Structures of Diffusers on Optical Properties of LED Light
A Refined Arnoldi Algorithm Based Krylov Subspace Technique for MEMS Model Order Reduction
A Novel Micro Mirror Spectrometer and Test Experiment
A Ground Target Positioning Method Facing Small UAVs
Study of a MEMS Short-Circuit Fuse Based on Electro-Thermal Theory
Chapter 3: Micro/Nano Fabrication & Measurement Technologies
Simulation on S Parameter of an X-Band Wilkinson Power Divider
Application of ICP Deep Trenches Etching in the Fabrication of FBAR Devices
Analysis of Broken Wires during Gold Wire Bonding Process
A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors
An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency
Design and Simulation for Tri-Axial Piezoresistive MEMS Accelerometer
Emulated Analysis of the Preview-LQG Controller for Micromachined Tunneling Gyroscope
Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology
Research on the Hydrophobicity of Black Silicon Based on Virtual Process
Investigation of Silicon Lapping and Polishing Technique for Micro-Inertial Device
Chapter 4: Microfluidics and Nano Fluids
The Microfluid-Driven Control by Forced Wave
Analysis and Simulation of Micro-Fluidic Inertial Switch
Experimental Study on a Small Flux, High Pressure Peristaltic Micropump
Numerical Simulation of Multi-Physical Fields Coupling and Design of a Digital Microfluidics Chip
Chapter 5: Nano Material Research/Nanotube/Nanowire Devices
Design and Simulation of Micro-Power Generator Based on Piezoelectric Effect for MEMS Devices Applications
Structures and Dielectric Properties of (Pb, La)(Zr, Ti)O3 Antiferroelectric Thick Films Prepared by Different Sintering Procedures
Accuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature Radius
Boron-Doped Nanocrystalline Silicon Thin Films Prepared by PECVD
Chapter 6: MEMS/NENS and Applications
Design and Realization of Modular MEMS-Based Attitude Measurement and Control System Based Wireless Sensor Networks
Effects of Different Package Structures on Thermal Properties of High Power White LED
Design of Ethernet Interface Based on FPGA and W5300
Size-Dependence on Load Properties of a Silicon Nanobeam
Integrated Micro-Sensor Detection System of Meteorological Information
Design of a Digital Decimation Filter for High-Precision 4-Order Sigma-Delta ADC
Chapter 7: Nanometer Biological /Nano Medicine
Detecting DNA Using a Single Graphene Pore by Molecular Dynamics Simulations
An Improved Sensitivity Non-Enzymatic Glucose Sensor Based on a Nano-Gold Modified Ag Electrode
Chapter 8: Packaging Technology
Study on Anodic Bonding Process of Slender Vitreous Body
Trial-Constructing a Novel Image of AAO Template
An Alignment Method for Lift-Off on Shallow Grooves in Transparent Substrates for Integrated Dual Grating Structures
Composite Content Influence on Multiwall Carbon Nanotubes-SiO2 Film Humidity Sensors at AC Testing