Sonstiges, Englisch, Band Volume 503, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g
Reihe: Key Engineering Materials
Sonstiges, Englisch, Band Volume 503, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g
Reihe: Key Engineering Materials
ISBN: 978-3-03795-187-3
Verlag: Trans Tech Publications
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology.
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Technik Allgemein Nanotechnologie
- Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Biotechnologie Biotechnologie: Mikrotechnologie, Nanobiotechnologie
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
Weitere Infos & Material
The Out-Rotator of Spin Traveling Wave Pump on Magnetic FluidA Monolithic Integrated Pressure SensorA High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-GyroscopePull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic SupportsResearch on Two-Dimensional Scanning Characteristics of MEMS Resonant MirrorDesign and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite MembraneNew Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature SensorsMEMS Grating with Interdigitated-Comb StructureLow Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure SensorMicro-Machined Electrochemical Seismic Sensors with Interdigital ElectrodesOptimal Design of Micro Plastic Heat RadiatorA Miniaturized Piezoelectric Wind Flutter GeneratorLow Frequency Electrochemical Accelerometer with Low Noise Based on MEMSA Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-AccelerometersSimulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS TechnologyPhase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick FilmsHeating Carve Technique for Polymer Microfluidic MicrochannelStructure Design of a Novel Micromachinined Tuning Fork Gyroscope with High RobustnessMEMS Bionic Vector HydrophoneVibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-AccelerometerAn Interface for Low-Q Micromachined GyroscopeA High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined AccelerometerResearch of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper WaveguideA Simple Method for Depositing DNA on the MicaA Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH SolutionAnalysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis AccelerometerA 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable MirrorQuadrature Error and Offset Error Suppression Methods for Micro-GyroscopesClosed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined GyroscopeDesign and Simulation of Multi-Microchannel for Thermal Wind SensorStudy of High Sensitivity Sensor Based on the Principle of PhotoionizationDesign and Simulation of a Capacitive Biaxial MicroaccelerometerAir Gap Flux Density for the Planar MotorA High-Performance Mash Fourth-Order Sigma-Delta ModulatorClosed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic ExcitationA Novel Preconcentration Method for Microchip Based Electrophoresis and its Numerical SimulationSimulation of Injection Molding of Ultra-Thin Light Guide Plate with Hemispherical MicrostructuresDesign of a MEMS Broadband Microstrip Patch Antenna Based on Minkowski Fractal BoundaryInvestigation on Transmittance and Uniformity of Light Diffuser Plate of Scattering Optical Transmission PolymerAnalytical Model of Fluxgate SystemOptimal Design and Simulation of a Cross-Plane Micro-Thermoelectric GeneratorEliminating the External Libration Sound for the Optical Microsphere-Taper Coupling StructureDevelopment of a Portable Phosphate Detection System Using Cobalt Based MicroelectrodesEffect of Micro Structures of Diffusers on Optical Properties of LED LightA Refined Arnoldi Algorithm Based Krylov Subspace Technique for MEMS Model Order ReductionA Novel Micro Mirror Spectrometer and Test ExperimentA Ground Target Positioning Method Facing Small UAVsStudy of a MEMS Short-Circuit Fuse Based on Electro-Thermal TheorySimulation on S Parameter of an X-Band Wilkinson Power DividerApplication of ICP Deep Trenches Etching in the Fabrication of FBAR DevicesAnalysis of Broken Wires during Gold Wire Bonding ProcessA High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial SensorsAn In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance FrequencyDesign and Simulation for Tri-Axial Piezoresistive MEMS AccelerometerEmulated Analysis of the Preview-LQG Controller for Micromachined Tunneling GyroscopeTwo Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS TechnologyResearch on the Hydrophobicity of Black Silicon Based on Virtual ProcessInvestigation of Silicon Lapping and Polishing Technique for Micro-Inertial DeviceThe Microfluid-Driven Control by Forced WaveAnalysis and Simulation of Micro-Fluidic Inertial SwitchExperimental Study on a Small Flux, High Pressure Peristaltic MicropumpNumerical Simulation of Multi-Physical Fields Coupling and Design of a Digital Microfluidics ChipDesign and Simulation of Micro-Power Generator Based on Piezoelectric Effect for MEMS Devices ApplicationsStructures and Dielectric Properties of (Pb, La)(Zr, Ti)O3 Antiferroelectric Thick Films Prepared by Different Sintering ProceduresAccuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature RadiusBoron-Doped Nanocrystalline Silicon Thin Films Prepared by PECVDDesign and Realization of Modular MEMS-Based Attitude Measurement and Control System Based Wireless Sensor NetworksEffects of Different Package Structures on Thermal Properties of High Power White LEDDesign of Ethernet Interface Based on FPGA and W5300Size-Dependence on Load Properties of a Silicon NanobeamIntegrated Micro-Sensor Detection System of Meteorological InformationDesign of a Digital Decimation Filter for High-Precision 4-Order Sigma-Delta ADCDetecting DNA Using a Single Graphene Pore by Molecular Dynamics SimulationsAn Improved Sensitivity Non-Enzymatic Glucose Sensor Based on a Nano-Gold Modified Ag ElectrodeStudy on Anodic Bonding Process of Slender Vitreous BodyTrial-Constructing a Novel Image of AAO TemplateAn Alignment Method for Lift-Off on Shallow Grooves in Transparent Substrates for Integrated Dual Grating StructuresComposite Content Influence on Multiwall Carbon Nanotubes-SiO2 Film Humidity Sensors at AC Testing
