Wong / Mengüç Thermal Transport for Applications in Micro/Nanomachining

1. Auflage 2008
ISBN: 978-3-540-73607-3
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 231 Seiten, eBook

Reihe: Microtechnology and MEMS

Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice structures. It then covers modeling of thermal transport at the nanoscale and details simulations of different processes relevant to nanomachining. The final chapter summarizes the important points and discusses directions for future work to improve the modeling of nanomachining.

Zielgruppe

Research

Autoren/Hrsg.

Wong, Basil T.

Mengüç, Pinar M.

Inhaltsverzeichnis

Transport Equations.- Modeling of Transport Equations via MC Methods.- Modeling of e-Beam Transport.- Thermal Conduction Coupled with e-Beam Transport.- Two-Temperature Model Coupled with e-Beam Transport.- Thermal Conduction with Electron Flow/Ballistic Behavior.- Parallel Computations for Two-Temperature Model.- Molecular Dynamics Simulations.- Concluding Remarks.