Buch, Englisch, 830 Seiten, Format (B × H): 170 mm x 240 mm, Gewicht: 1600 g
Buch, Englisch, 830 Seiten, Format (B × H): 170 mm x 240 mm, Gewicht: 1600 g
ISBN: 978-3-03785-175-3
Verlag: Trans Tech Publications
Autoren/Hrsg.
Fachgebiete
Weitere Infos & Material
Preface
CHAPTER 1: Micro/Nano Fabrication & Measurement Technologies
Application of Ultrasonic Stress Relief in the Fabrication of SU-8 Micro Structure
Design and Empirical Study for Coner Compensation in 25% Wt TMAH Etching on (100) Silicon Wafers
Characterization of AlGaN/GaN Cantilevers Fabricated with Deep-Release Techniques
Dynamic Characteristics Measurement of Silicon Micro-Cantilever in Low Temperature Environment
Low Cost Fabrication of Micro Glass Cavities For MEMS Wafer Level and Hermetic Packaging
Study of Under Etching Characters of Si (100) in Surfactant Added TMAH
Design and System-Level Simulation of a Novel On-Chip Test Based on Macromodels
An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
Fabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer Stamp
Effect of Micro-Injection Molding Process Parameters for Various Micro-Channels
Fabrication and Testing of SOG Structure Flat Heat Pipes with Triangle Grooves
Application of KOH Anisotropic Etching in the Fabrication of MEMS Devices
Fabrication of Nano-Grating by Focused Ion Beam / Scanning Electron Microscopy Dual-Beam System
A Monolithic MEMS Accelerometer Process
Fabrication and Performance Simulation of Microscale Thermoelectric Modules Made with Bi2Te3-Based Alloys
Investigation on Silicon-Glass Electrostatic Bonding Time Experiment
Low-Cost Fabrication Strategies of Microfluidic Device on Glass Substrate
Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching
CHAPTER 2: Micro Sensors and Actuators
A Capacitor-Free CMOS Low-Noise, Low-Dropout Regulator for Capacitive Micro-Machined Accelerometer Application
3D Pyramidal Micropool Array Electrode for Amperometric Microsensor
Design and Implementation of SOI Based Capacitive Microaccelerometers Without Notching Effects
Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter
Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever
Structure Design and Experiment for a Resonant Accelerometer based on Electrostatic Stiffness
Two-Dimensional Motor Based on Surface Acoustic Wave
A Triple Channel High Rejection RF MEMS Switched Filter Bank
A Micro Spatial Light Modulator Based on Leverage Principle
Design, Development and Testing of Quartz Tuning Fork Temperature Sensor
A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass
Design and Fabrication of a Piezoelectric Sensor for Weighing in Motion
Simulation and Design on Structure for Experimental Verification of Dielectric Charging of Millimeter-Wave MEMS Switches
A Miniature Fluxgate Sensor with CMOS Interface Circuitry
A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames
The Design of AlGaN/GaN HEFT-Micro-Accelerometer and Temperature- Dependence Electrical Performance
Temperature Characteristic of Platinum Piezoresistive Pressure Sensor
Design and Simulation of Electromagnetic Two-Dimensional MOEMS Scanning Mirror
Micro Magnetic Field Sensor Based On Terfenol-D/PZT/Terfenol-D Magnetoelectric Composites
Design of the Resonance Tracking System for a Resonant Accelerometer Based on Electrostatic Stiffness
Structure Design, Fabrication and Characteristics of Polysilicon Nano-Thin Films Resistances Pressure Sensor Based on MEMS Technology
A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology
The Study of a Fluxgate SPICE Model Based on Schmitt Trigger
System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer
Technique for Compensation of Temperature Drift in Thermal Excited Si-Based Resonant Pressure Sensor
On-Chip Temperature-Control Technology for Silicon Micro-Gyroscope
Experimentally Study of the Cushion Materials for Micro Accelerometer under Shock Load
Design and Fabrication of Micro Oxygen Sensor
Nanostructures and Nanodevices Special Fabrication and Characterization
CHAPTER 3: Microfluidic Devices and Systems
Electrohydrodynamic Printing of Conductive Patterns on Glass Slides
Improve Blood Clotting Feature of Silicon Microneedle by Silver Coating
Design of the Cascaded Open-Channel Direct Current Electroosmotic Pump
On-Chip Bio-Micro Separation and Operation Effected on the Diamagnetic Levitation with MEMS
Numerical Simulation of Dielectrophoresis Induced Electrothermal Fluid Flow
Research of Separation of Amino Acids on Micro-Free Flow Electrophoresis Chip with Voltage Applied in Two-Dimension
The Fabrication of Ag Nanostructure Array Integrated with Microfluidics for Surface Enhanced Raman Scattering
Stokes' Second Problem with Velocity Slip Boundary Condition
An Experimental Study on the Side-Opening Filling Process at the Interface between Microchannels with Different Widths
A Porous Microfluidic Chip for Protein Extraction Based on Solid Phase Extraction Method
Characters of Particles in Copper-Water Nanofluids Made by Novel One-Step Aqueous Reduction
Numerical Simulation of Electromagnetic Actuator for Impedance Pumping
Study on Ultrasonic Fusion Bonding for Polymer Microfluidic Chips
Study of the Microfluidic-Immunoassay Chip used to Capture Cancer Cells
Simulation and Experimental Study of a Porous Electroosmotic Pump
Experimental Investigations of Anode Structure on the Performance of Air-Breathing µDMFC
The Competition of the Retraction and Capillary Forces during the DNA Molecules Moving within Channels
Development of a Novel Electrochemical Surface Plasmon Resonance Instrument Based on a Mini Three Electrode Flow Cell
The Fabrication and Experiment of a Four-Electrode Conductivity Sensor for Fresh Water
Fabrication of PDMS Microchannels with Round Profiles Using Glycerol Molds
Theoretical Analysis and Experimental Investigation on Designing Method of Micro-Groove Heat Pipe
Magnetic Microfluidic Mixer
Rapid Microfluidc Biochips Fabrication by Femtosecond Laser on Glass Substrate
Rapid Detection of Methanol in an Integration Microfluidic Chip
A Tire Pressure Monitoring System Based on MEMS Sensor
A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever
CHAPTER 4: MEMS/NENS and Applications
Development of the 400MHz Power Durable SAW Filter
A Research on Implantable Microelectrodes for EMG Signal Acquisition
A Laterally Thermally-Actuated RF MEMS Capacitive Switch with Parylene as Dielectric Layer
Design and Test of a Self-Oscillating Driving ASIC for a Low-Q Gyroscope Based on PI Controller
Design and Development of the Shrapnel-Borne Meteorological Exploration System Based on MEMS
Research of Curved Artificial Compound Eyes Based on MEMS Technology
Macro Machined Photoacoustic Non-Resonant Cell
Research of the Hadamard Multiplex Advantages Using a Programmable Micro-Mirror in a Near-Infrared Spectrometer
A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer
A Micro-Optical Transceiver for Interferometric Fiber Optic Gyroscope
Polarization-Noise in Integrated Optical Gyro
A Piezoelectrically Actuated Scaning Micromirror Integrated with Angle Sensors
Silicon-Based Microneedle Array Electrodes for Biopotential Measurement
A Miniaturized Spectrometer Based on Optical Modulator Composed of Grating and Tunable Fabry-Perot
Novel Triplexer Chip Design Combination of an Asymmetric Y Branch Waveguide and a Multimode Interference
Lateral RF MEMS Switch Based on Surface Micromachining Process
An AD7746-Based Data Acquisition System for Capacitive Pressure Sensor in Weather Detection Application
Design and Test of MEMS Attitude Measurement Unit for Fall Detection
A High-Performance Interface ASIC for Quartz Rate Sensor
New Style Four-Electrode MEMS Conductivity Chip
A Curvature-Compensated, High Power Supply Rejection CMOS Bandgap Reference for MEMS Micro-Accelerometer
A Four-Quadrant Analog Multiplier Based on CMOS Source Coupled Pair
Designing Experiment Platform for Micro Heat Exchangers
Realization of Hadamard Transform Encoding Mask Using Programmable Digital Micro-Mirror Device
Study of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS Technology
Design of High-SNR CMOS Interface Circuit for Micro-Machined Gyroscope
Nano-Piezoelectric Ceramics Power Supply Based on Single Electron Storage
CHAPTER 5: Nano Material Research/Nanotube/Nanowire Devices
MEMS Assisted Fabrication of Cr Nanobowls
Effect of Temperature on Elasticity of Silicon Nanowires
Design, Fabrication and Characterization of in-Plane Titanium Microneedles for Transdermal Drug Delivery
Characterization of Contact and Bulk Piezoresistive Properties of Carbon Nanotube/Styrene-Butadiene-Styrene Composite
Design of MMFCS for MAV Based on MEMS Sensor
Improvement on Mechanical and Piezoresistivity Properties of Cementitious Binder by Using Surface Oxidized Multi-Wall Carbon Nanotubes
Biocompatibility Study of Mn0.5Zn0.5Fe2O4 Magnetic Nanoparticles
Fabrication and Characterization of Cobalt Nanostructure-Based Microelectrodes for Phosphate Detection
Fabrication of Silicon Nano-wire by Oxidation
DFT Study of Structure, Electronic, Optical and Magnetic Properties of ZnO and Cu-Doped ZnO Clusters
Theoretic Study of the Structures and Electric Properties of N-Doped InSb Nanoclusters
Effect of Compressive Strain on Electrical Resistivity of Carbon Nanotube Cement-Based Composites
Effect of Wet Etching Parameter on the Diameter and Length of Silicon Nanowires
Adhesive Enhancement Improved Field Emission Characteristics of Carbon Nanotube Arrays on Energetic Ion Pre-Bombarded Si Substrates
Electrodeposition of Copper Nano-Clusters at a Platinum Microelectrode for Nitrate Determination
CHAPTER 6: Micropower Technology
Design and Research of Flat Micro Heat Pipe with Glass Fiber Wick
Fabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT Films
Design, Simulation and Fabrication of an Air-Driven Microturbomachine
Design and Fabrication of a Polymer-Based Micro Direct Methanol Fuel Cell
A Novel Assembly Method for a Micro Direct Methanol Fuel Cell Using Multi-Layer Bonding Technique
A Broadband Frequency Piezoelectric Vibration Energy Harvester
Fabrication of Piezoelectric Vibration Power Harvester using Bulk PZT
Study on the Performance of Gas Journal Bearings for Power MEMS
CHAPTER 7: Theories in Micro-Nano Technologies
Analysis and Research of Piezoelectric Dynamic Weighing Sensor
Multidisciplinary Design Optimization of the 2-D Microaccelerometer
Assessing the Validity of Quantum Corrections to Molecular Dynamics Simulations of Bulk Silicon
Molecular Dynamics Study of Water Structure Confined in Vibrative Silicon Plates
Molecular Dynamic Simulations of Contact Thermal Resistance between Two Individual Silicon Nanowires
Micro-Stress Assembly of Fragile Miniature Parts
Design and Simulation of a Differential and Decoupled Micromachined Gyroscope
Analytical Solution of Mixed Electroosmotic and Pressure-Driven Flow in Rectangular Microchannels
Rapidly Identify the Critical Parameter of MEMS Device Based on Element Model Library
Electrical Characteristics of a Stimulating Microelectrode-Electrolyte Interface
Analysis of Capillary Condensation of Vapor in Multi-Wall Carbon Nanotubes
Parametric Research on Micro-Zigzag Slot Mechanism in OICW
Performance Analysis of a Novel MEMS Terminational Latch Mechanism
Effects of Phosphorus-Doping on the Microstructures, Optical and Electric Properties in N-Type Si:H Thin Films
Stability Analysis in High-Order Electromechanical Sigma-Delta Accelerometer
Experimental Research on Lift up and Drag Reduction Effect of Streamwise Travelling Wave Wall
Optimization Based on ANSYS Electric Numerical Method for a Novel MEMS ESI-MS Ion Focusing Device
Tribological Properties of Magnesium Silicate Powders Prepared by Ball Milling
TCR of the Ni-Cr Thin Film Resistors Used in Piezoresistive Pressure Sensor
Failure Mechanisms and Lifetime Simulation Method for Nano Scale CMOS Device
Threshold Values Analysis of Substrate Parameters Based on MEMS Microstrip Filter
Thermal Transport through Solid-Solid Interface with an Interlayer
Dielectric Constant Measurement of Liquids Using Nanosecond-Pulsed Signals
Optical Properties of Silicon Quantum Dots
Generation and Application of the Atmospheric Pressure DC Glow Discharge Using Minor Electrodes under N2 Flow
Patterns of Skylight Polarization at Different Atmospheric Conditions
The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
A Novel Noise Elimination Method for MEMS Sensor
Nonlinear Ultrasonic Techniques for Testing Micro-Defects in Metal Matrix Composite Structure
Piezoresistive Sensitivity and Al Ohmic Contact of Highly Doped Polycrystalline Silicon Nano Thin Films
